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Analytical and Bioanalytical Chemistry

Volumn 396, Issue 1, 2010, Pages 173-180

Optical far- and near-field femtosecond laser ablation of Si for nanoscale chemical analysis

(3) Zorba, Vassilia a Mao, Xianglei a Russo, Richard E a,b

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

b Applied Spectra Inc (United States)

Author keywords

Far field; Laser ablation; Laser spectroscopy; LIBS; Near field; Semiconductor materials; Silicon

Indexed keywords

CRATER SIZES; FAR-FIELD; FEMTO-SECOND LASER; FEMTOSECOND LASER ABLATION; FEMTOSECOND LASER BEAMS; FEMTOSECOND LASER PULSE; FEMTOSECONDS; LASER-INDUCED BREAKDOWN SPECTROSCOPY; LIBS; MATERIAL DAMAGES; NANO SCALE; NANOSCIENCE AND NANOTECHNOLOGIES; NEAR-FIELD; SPATIAL RESOLUTION; SPECTRAL EMISSION; SUBMICROMETERS; SUBWAVELENGTH APERTURES;

CHEMICAL ANALYSIS; CHEMICALS; LASER ABLATION; LASER CHEMISTRY; LASER SPECTROSCOPY; LASERS; MICROMETERS; NANOSCIENCE; NANOSTRUCTURED MATERIALS; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR LASERS; SPECTRUM ANALYSIS; ULTRASHORT PULSES;

PULSED LASER APPLICATIONS;

EID: 72849120733 PISSN: 16182642 EISSN: 16182650 Source Type: Journal
DOI: 10.1007/s00216-009-3136-7 Document Type: Article

Times cited : (37)

References (25)

1
- 0036025827
- 10.1039/b202044k 1:CAS:528:DC%2BD38Xms1eqsb8%3D
- RE Russo XL Mao JJ Gonzalez SS Mao 2002 J Anal At Spectrom 17 1072 1075 10.1039/b202044k 1:CAS:528:DC%2BD38Xms1eqsb8%3D
- (2002) J Anal at Spectrom , vol.17 , pp. 1072-1075
- Russo, R.E.¹ Mao, X.L.² Gonzalez, J.J.³ Mao, S.S.⁴

2
- 6344260287
- 10.1039/b403368j 1:CAS:528:DC%2BD2cXnt12isLg%3D
- RE Russo XL Mao C Liu JJ Gonzalez 2004 J Anal At Spectrom 19 1084 1089 10.1039/b403368j 1:CAS:528:DC%2BD2cXnt12isLg%3D
- (2004) J Anal at Spectrom , vol.19 , pp. 1084-1089
- Russo, R.E.¹ Mao, X.L.² Liu, C.³ Gonzalez, J.J.⁴

3
- 0000062699
- 10.1039/a901765h 1:CAS:528:DyaK1MXlsVKhurg%3D
- SF Durrant 1999 J Anal At Spectrom 14 1385 1403 10.1039/a901765h 1:CAS:528:DyaK1MXlsVKhurg%3D
- (1999) J Anal at Spectrom , vol.14 , pp. 1385-1403
- Durrant, S.F.¹

4
- 0345237256
- 10.1016/S0584-8547(99)00011-7
- D Günther SE Jackson HP Longerich 1999 Spectrochim Acta B 54 381 409 10.1016/S0584-8547(99)00011-7
- (1999) Spectrochim Acta B , vol.54 , pp. 381-409
- Günther, D.¹ Jackson, S.E.² Longerich, H.P.³

5
- 1942424893
- 10.1081/ASR-120028868 1:CAS:528:DC%2BD2cXhvVWmtL0%3D
- WB Lee JY Wu YI Lee J Sneddon 2004 Applied Spectroscopy Reviews 39 27 97 10.1081/ASR-120028868 1:CAS:528:DC%2BD2cXhvVWmtL0%3D
- (2004) Applied Spectroscopy Reviews , vol.39 , pp. 27-97
- Lee, W.B.¹ Wu, J.Y.² Lee, Y.I.³ Sneddon, J.⁴

6
- 0004115497
- Springer Berlin
- Bäuerle D (2000) Laser processing and chemistry. Springer, Berlin
- (2000) Laser Processing and Chemistry
- Bäuerle, D.¹

7
- 0029219497
- 10.1016/0030-4018(94)00585-I 1:CAS:528:DyaK2MXjtVSlt70%3D
- PP Pronko SK Dutta J Squier JV Rudd D Du G Mourou 1995 Opt Commun 114 106 110 10.1016/0030-4018(94)00585-I 1:CAS:528:DyaK2MXjtVSlt70%3D
- (1995) Opt Commun , vol.114 , pp. 106-110
- Pronko, P.P.¹ Dutta, S.K.² Squier, J.³ Rudd, J.V.⁴ Du, D.⁵ Mourou, G.⁶

8
- 0142165865
- 10.1007/s00340-003-1262-z 1:CAS:528:DC%2BD3sXnslCqsrY%3D
- A Assion M Wollenhaupt L Haag F Mayorov C Sarpe-Tudoran M Winter U Kutschera T Baumer 2003 Appl Phys, B Lasers Opt 77 391 397 10.1007/s00340-003- 1262-z 1:CAS:528:DC%2BD3sXnslCqsrY%3D
- (2003) Appl Phys, B Lasers Opt , vol.77 , pp. 391-397
- Assion, A.¹ Wollenhaupt, M.² Haag, L.³ Mayorov, F.⁴ Sarpe-Tudoran, C.⁵ Winter, M.⁶ Kutschera, U.⁷ Baumer, T.⁸

9
- 37549003227
- Hwang DJ, Jeon H, Grigoropoulos CP, Yoo J, Russo RE (2007) Applied Physics Letters 91: 251118-1-3.
- (2007) Applied Physics Letters , vol.91 , pp. 2511181-2511183
- Hwang, D.J.¹ Jeon, H.² Grigoropoulos, C.P.³ Yoo, J.⁴ Russo, R.E.⁵

10
- 0000384614
- 10.1002/(SICI)1521-3773(20000515)39:10<1746::AID-ANIE1746>3.0. CO;2-Q
- R Zenobi V Deckert 2000 Angew Chem Int Ed 39 1746 1756 10.1002/(SICI)1521-3773(20000515)39:10<1746::AID-ANIE1746>3.0.CO;2-Q
- (2000) Angew Chem Int Ed , vol.39 , pp. 1746-1756
- Zenobi, R.¹ Deckert, V.²

11
- 0037291140
- Looking at the nanoscale: Scanning near-field optical microscopy
- DOI 10.1016/S0165-9936(03)00201-2
- M De Serio R Zenobi V Deckert 2003 Trends Anal Chem 22 70 77 10.1016/S0165-9936(03)00201-2 (Pubitemid 36293806)
- (2003) TrAC - Trends in Analytical Chemistry , vol.22 , Issue.2 , pp. 70-77
- De Serio, M.¹ Zenobi, R.² Deckert, V.³

12
- 33846409521
- Recent progress of nano-technology with NSOM
- DOI 10.1016/j.micron.2006.06.010, PII S096843280600103X
- J Kim KB Song 2007 Micron 38 409 426 10.1016/j.micron.2006.06.010 1:CAS:528:DC%2BD2sXht1aju7s%3D (Pubitemid 46149335)
- (2007) Micron , vol.38 , Issue.4 , pp. 409-426
- Kim, J.¹ Song, K.-B.²

13
- 0030128552
- Pulsed laser-induced desorption and optical imaging on a nanometer scale with scanning near-field microscopy using chemically etched fiber tips
- DOI 10.1063/1.115831, PII S0003695196030185
- D Zeisel S Nettesheim B Dutoit R Zenobi 1996 Appl Phys Lett 68 2491 2492 10.1063/1.115831 1:CAS:528:DyaK28Xis1Skur4%3D (Pubitemid 126683952)
- (1996) Applied Physics Letters , vol.68 , Issue.18 , pp. 2491-2492
- Zeisel, D.¹ Nettesheim, S.² Dutoit, B.³ Zenobi, R.⁴

14
- 10844275570
- Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser
- DOI 10.1007/s00339-004-3093-0
- Y Lin MH Hong WJ Wang YZ Law TC Chong 2005 Appl Phys A 80 461 465 10.1007/s00339-004-3093-0 1:CAS:528:DC%2BD2cXhtVGitLvP (Pubitemid 40003087)
- (2005) Applied Physics A: Materials Science and Processing , vol.80 , Issue.3 , pp. 461-465
- Lin, Y.¹ Hong, M.H.² Wang, W.J.³ Law, Y.Z.⁴ Chong, T.C.⁵

15
- 33846529973
- Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy
- DOI 10.1016/j.sna.2006.05.047, PII S0924424706004213
- Y Lin MH Hong WJ Wang ZB Wang GX Chen Q Xie LS Tan TC Chong 2007 Sens Actuators A 133 311 316 10.1016/j.sna.2006.05.047 (Pubitemid 46162166)
- (2007) Sensors and Actuators, A: Physical , vol.133 , Issue.2 SPEC. ISS. , pp. 311-316
- Lin, Y.¹ Hong, M.H.² Wang, W.J.³ Wang, Z.B.⁴ Chen, G.X.⁵ Xie, Q.⁶ Tan, L.S.⁷ Chong, T.C.⁸

16
- 37549018065
- Wen SB, Greif R, Russo RE (2007) Appl Phys Lett 91:251113-1-3
- (2007) Appl Phys Lett , vol.91 , pp. 2511131-2511133
- Wen, S.B.¹ Greif, R.² Russo, R.E.³

17
- 33845920851
- Hwang DJ, Grigoropoulos CP, Yoo J, Russo RE (2006) Appl Phys Lett 89: 254101-1-3
- (2006) Appl Phys Lett , vol.89 , pp. 2541011-2541013
- Hwang, D.J.¹ Grigoropoulos, C.P.² Yoo, J.³ Russo, R.E.⁴

18
- 47749114599
- Hwang DJ, Jeon H, Grigoropoulos CP, Yoo J, Russo RE (2008) J Appl Physi 104: 013110-1-12.
- (2008) J Appl Physi , vol.104 , pp. 0131101-0131112
- Hwang, D.J.¹ Jeon, H.² Grigoropoulos, C.P.³ Yoo, J.⁴ Russo, R.E.⁵

19
- 34047109564
- Horcas I, Fernandez R, Gomez-Rodriguez JM, Colchero J, Gomez-Herrero J, Baro AM (2007) Rev Sci Instrum 78:013705-1-8
- (2007) Rev Sci Instrum , vol.78 , pp. 0137051-0137058
- Horcas, I.¹ Fernandez, R.² Gomez-Rodriguez, J.M.³ Colchero, J.⁴ Gomez-Herrero, J.⁵ Baro, A.M.⁶

20
- 12044259475
- 10.1126/science.251.5000.1468
- E Betzig JK Trautman TD Harris JS Weiner RL Kostelak 1991 Science 251 1468 1470 10.1126/science.251.5000.1468
- (1991) Science , vol.251 , pp. 1468-1470
- Betzig, E.¹ Trautman, J.K.² Harris, T.D.³ Weiner, J.S.⁴ Kostelak, R.L.⁵

21
- 68249128920
- Zorba V, Mao XL, Russo RE (2009) Appl Phys Lett 95:041110-1-3.
- (2009) Appl Phys Lett , vol.95 , pp. 0411101-0411103
- Zorba, V.¹ Mao, X.L.² Russo, R.E.³

22
- 0003998388
- CRC Boca Raton
- Lide DR (1994) CRC handbook of chemistry and physics. CRC, Boca Raton, pp 12-134
- (1994) CRC Handbook of Chemistry and Physics , pp. 12-134
- Lide, D.R.¹

23
- 0020159721
- 10.1116/1.571669 1:CAS:528:DyaL38XlsFWnt7o%3D
- SA Schafer SA Lyon 1982 J Vac Sci Tech 21 422 425 10.1116/1.571669 1:CAS:528:DyaL38XlsFWnt7o%3D
- (1982) J Vac Sci Tech , vol.21 , pp. 422-425
- Schafer, S.A.¹ Lyon, S.A.²

24
- 33646743149
- Hwang DJ, Grigoropoulos CP, Choi TY (2006) J Appl Physi 99:083101-1-6.
- (2006) J Appl Physi , vol.99 , pp. 0831011-0831016
- Hwang, D.J.¹ Grigoropoulos, C.P.² Choi, T.Y.³

25
- 0003449924
- 2nd Edition (VCH)
- Montaser A, Golightly DW (1992) Inductively Coupled Plasmas in Analytical Atomic Spectroscopy, 2nd Edition (VCH) p. 375.
- (1992) Inductively Coupled Plasmas in Analytical Atomic Spectroscopy , pp. 375
- Montaser, A.¹ Golightly, D.W.²

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