Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate

ISOT 2009 - International Symposium on Optomechatronic Technologies

Volumn , Issue , 2009, Pages 445-450

  Bellouard, Yves ^a   Said, Ali A ^b   Dugan, Mark ^b   Bado, Philippe ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TRANSLUME INC   (United States)

Author keywords

Component; Femtosecond lasers; Fused silica; Integrated devices; Monolithic integration; Optofluidics; Waveguides

Indexed keywords

COMPONENT; FEMTO-SECOND LASER; INTEGRATED DEVICE; MONOLITHIC INTEGRATION; OPTO-FLUIDICS;

FLUIDICS; IRRADIATION; LASERS; MICROSYSTEMS; MONOLITHIC INTEGRATED CIRCUITS; OXIDES; PULSED LASER APPLICATIONS; SILICA; ULTRASHORT PULSES; WAVEGUIDES;

FUSED SILICA;

EID: 72749101442     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISOT.2009.5326161     Document Type: Conference Paper

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