Synthesis and characterization of hybrid organic-inorganic thin films via atomic layer deposition for mems/nems

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 244-247

  Seghete, D ^a   Chang, Y J ^b   Davidson, B ^b   Bright, V M ^b   George, S M ^a  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC LAYER DEPOSITION; MICROSYSTEMS; PROTECTIVE COATINGS; SOLID-STATE SENSORS; THIN FILMS;

ACIDIC SOLUTIONS; ETCH BEHAVIOR; HIGH CARBON CONTENT; HYBRID ORGANIC-INORGANIC; LAYER DEPOSITION; LINEAR GROWTH; SACRIFICIAL LAYER; SYNTHESIS AND CHARACTERIZATIONS;

ORGANIC-INORGANIC MATERIALS;

EID: 71749103981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2008.64     Document Type: Conference Paper

References (17)

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