A simple micro pirani vacuum gauge fabricated by bulk micromachining technology

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 280-283

  Jinwen, Zhang ^a   Wei, Jiang ^a   Jilong, Zhou ^a   Xin, Wang ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Bulk micromachining technology; Pirani gauge; Vacuum measurement; Vacuum packaging

Indexed keywords

BULK MICROMACHINING TECHNOLOGY; BULK- MICROMACHINING; CURRENT SOURCES; DYNAMIC RANGE; HEAT TRANSFER AREA; HIGH ASPECT RATIO STRUCTURES; HIGH SENSITIVITY; PIRANI GAUGE; SINGLE CRYSTAL SILICON; VACUUM GAUGES; VACUUM MEASUREMENTS; VACUUM PACKAGING;

ACTUATORS; ASPECT RATIO; COMPOSITE MICROMECHANICS; GAGES; MICROMACHINING; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SILICON WAFERS; SINGLE CRYSTALS; VACUUM; VACUUM GAGES; VACUUM TECHNOLOGY;

SOLID-STATE SENSORS;

EID: 71449114417     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285508     Document Type: Conference Paper

References (7)

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