In-situ pressure measurements of encapsulated gyroscopes

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1175-1178

  Simon, I ^a   Billat, S ^a   Link, T ^a   Nommensen, P ^a   Auber, J ^a   Manoli, Y ^a,b  

^a Institute of Microsystem Technology (HSG IMIT)   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Encapsulation test; Gyroscope; Pirani; Vacuum; Wafer level test

Indexed keywords

ACTUATORS; CHEMICAL VAPOR DEPOSITION; GYROSCOPES; MICROSYSTEMS; MODEL STRUCTURES; NONMETALS; PARAMETER ESTIMATION; PRESSURE MEASUREMENT; SENSORS; SEPARATION; SILICON; STRUCTURAL OPTIMIZATION; TESTING; TRANSDUCERS;

ANALYTICAL MODELLING; CORIOLIS; DESIGN AND OPTIMIZATION; ENCAPSULATION TEST; GYROSCOPE; IN-SITU; INTERNATIONAL CONFERENCES; MEASUREMENT ACCURACY; PIRANI; PIRANI PRINCIPLE; SILICON-ON -INSULATOR; SOLID-STATE SENSORS; STATIC TESTING; TECHNOLOGICAL PARAMETERS; TEST METHODS; TEST STRUCTURES; VACUUM; VIBRATING GYROSCOPES; WAFER LEVEL TEST;

SILICON ON INSULATOR TECHNOLOGY;

EID: 50049084061     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300345     Document Type: Conference Paper

References (6)

1. W. Geiger, et al, "Test results of the Micromechanical Coriolis Rate Sensor μCors II", Proc. Symposium Gyro Technology 2004, Stuttgart, Germany, Sep. 2004
2. M. V. Pirani, Verhandlungen der Deutschen Physikalischen Gesellschaft 4,686-694, 1906
3. O. Wenzel and C.K. Bak, "The MicroPirani: a solid-state vacuum gauge with wide range" Vakuum in Forschung und Praxis, no. 4, 1998, pp. 298-301.
4. G. Bedö, W. Kraus and R. Müller, "Comparison of Different Micromechanical Vacuum Sensors", The 13th European Conference on Solid-State-Transducers, The Hague, The Netherlands, 1999, pp. 1057-1060.
5. A. Gaißr, et al., "Evaluation of DAVED-Microgyros realized with a new 50 μm SOI-based Technology", Proc. Symposium Gyro Technology 2003, Stuttgart, Germany Sep. 2003
6. I. Simon, "Thermal Conductivity and Metal Oxide Gas Sensors", Shaker Verlag, 2004.