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Applied Physics A: Materials Science and Processing

Volumn 97, Issue 3, 2009, Pages 513-519

Laser decal transfer of freestanding microcantilevers and microbridges

(6) Auyeung, R C Y a Kim, H a Birnbaum, A J a Zalalutdinov, M a Mathews, S A a Pique A a

a NAVAL RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AG NANOPARTICLE; ETCH PROCESS; FUNDAMENTAL RESONANCE FREQUENCY; IN-VACUUM; LASER SPOTS; LASER VIBROMETRY; MICRO-CANTILEVERS; MICROBRIDGES; OVEN CURING; Q-FACTORS; SACRIFICIAL LAYER; SI SUBSTRATES; SINGLE LASER PULSE; TENSILE RESIDUAL STRESS; THEORETICAL PREDICTION; TRANSFER PROCESS;

COMPOSITE MICROMECHANICS; LASERS; PULSED LASER APPLICATIONS; RESONANCE; SINTERING; SUBSTRATES;

SILVER;

EID: 70450284447 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5433-6 Document Type: Article

Times cited : (58)

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