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Volumn 605, Issue , 2000, Pages 229-234
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Mechanical property measurement of electroplated gold microstructure using resonance method
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Author keywords
[No Author keywords available]
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Indexed keywords
CANTILEVER BEAMS;
ELASTIC MODULI;
ELECTROPLATING;
ELECTROSTATICS;
MECHANICAL VARIABLES MEASUREMENT;
METALLOGRAPHIC MICROSTRUCTURE;
MICROMACHINING;
NATURAL FREQUENCIES;
NUMERICAL ANALYSIS;
RESIDUAL STRESSES;
ELECTROPLATED GOLD MICROSTRUCTURE;
ELECTROPLATING SURFACE MACHINING TECHNIQUE;
FIXED BOUNDARY ANCHOR;
MICROBEAMS;
GOLD;
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EID: 0034506755
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (11)
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