Solid-phase crystallization of evaporated silicon thin films on glass for photovoltaics: A combined SEM and TEM study

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7409, Issue , 2009, Pages

  Liu, Fude ^a   Romero, M J ^a   Jones, K M ^a   Al Jassim, M M ^a   Kunz, O ^b   Wong, J ^b   Aberle, A G ^b,c  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Evaporation; Glass; Impurities; Intragrain defects; Photovoltaics; Polycrystalline silicon; Solid phase crystallization; Thin film solar cells

Indexed keywords

AVERAGE GRAIN SIZE; BAND TAIL; EVAPORATED SILICON; HIGH DEFECT DENSITIES; HIGH QUALITY; IMPURITY INCORPORATION; IMPURITY LEVEL; LIMITING FACTORS; OPTICAL ACTIVITY; PHOTOVOLTAIC APPLICATIONS; PHOTOVOLTAICS; POLY-CRYSTALLINE SILICON; POLY-SI THIN FILM; SEM AND TEM; SI FILMS; SOLID PHASE CRYSTALLIZATION; SOLID-PHASE; THIN-FILM SOLAR CELLS;

CRYSTALLIZATION; DEFECT DENSITY; DEFECTS; EVAPORATION; GLASS; IMPURITIES; OXYGEN; PHOTOVOLTAIC EFFECTS; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SOLAR CELLS; THIN FILM DEVICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 70449642942     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.823622     Document Type: Conference Paper

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