Ultra-thin super high frequency two-port AlN contour-mode resonators and filters

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 577-580

  Rinaldi, M ^a   Zuniga, C ^a   Zuo, C ^a   Piazza, G ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Aluminum nitride (AlN) film; Contour mode resonators; MEMS filters; Resonators; Super high frequency

Indexed keywords

ALN; CONTOUR-MODE RESONATORS; HIGH FREQUENCY; MEMS FILTER; SUPER HIGH FREQUENCY;

ACTUATORS; ALUMINUM; ALUMINUM NITRIDE; ELECTROMECHANICAL FILTERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NITRIDES; OPTICAL FILTERS; PIEZOELECTRIC TRANSDUCERS; RESONATORS;

SOLID-STATE SENSORS;

EID: 70449515241     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285390     Document Type: Conference Paper

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