Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 358-363

  Thiruvenkatanathan, P ^a   Yan, J ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE APPROACH; AMBIENT PRESSURES; AMBIENT TEMPERATURES; COMMON MODE REJECTIONS; COUPLED RESONATOR; EIGENSTATES; MEMS RESONATORS; MICROMECHANICAL SENSORS; MODE LOCALIZATION; ORDERS OF MAGNITUDE; PARAMETRIC PERTURBATIONS; PARAMETRIC SENSITIVITY; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; SENSOR APPLICATIONS; SMALL PERTURBATIONS; THREE ORDERS OF MAGNITUDE; ULTRA-HIGH; VIBRATION BEHAVIOR; VIBRATION LOCALIZATION;

CRYSTAL RESONATORS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; SENSORS; STIFFNESS;

NATURAL FREQUENCIES;

EID: 70449490658     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168201     Document Type: Conference Paper

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