Bandwidth control in acoustically coupled AlN contour mode MEMS filters

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 64-69

  Carlos, R Perez ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; BANDWIDTH CONTROL; CONTOUR MODE; CONTOUR-MODE RESONATORS; HIGHER ORDER; HIGHER ORDER RESONANCES; MEMS FILTER; MULTIPLE METALS; NOVEL METHODS; PICKING UP; WIDE BANDWIDTH;

BANDWIDTH; ELECTROMECHANICAL FILTERS; POLES;

ELECTRODES;

EID: 70449472913     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168143     Document Type: Conference Paper

References (9)

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8. A.F. Wright, "Elastic properties of zinc-blende and wurtzite AlN, GaN, and InN," Journal of Applied Physics,.Vol 82, pp. 2833-2839 June 1997
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