Synthesis and SAW characteristics of AlN thin films fabricated on Si and GaN using helicon sputtering system

Electronics Letters

Volumn 39, Issue 23, 2003, Pages 1691-1693

  Chen, S W ^a   Lin, H F ^a   Sung, T T ^a   Wu, J D ^a   Kao, H L ^a   Chen, J S ^b  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b National Science Council   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM NITRIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA; SPUTTERING; THIN FILMS;

HELICON SPUTTERING SYSTEM; HIGH FREQUENCY FILTERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0344549824     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20031088     Document Type: Article

References (8)

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