The hydrid model for SAW filter

Proceedings of the 15th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2008

Volumn , Issue , 2008, Pages 336-339

  Hoang, Trang ^a   Rey, Patrice ^a   Vaudaine, Marie Helene ^a   Robert, Philippe ^a   Benech, Philippe ^b  

^a CEA LETI   (France)

^b IMEP LAHC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES;

APPLIED PRESSURES; SAW FILTERS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 57849129578     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICECS.2008.4674859     Document Type: Conference Paper

References (13)

1. W.R.Smith, H.M.Gerard, J.H.Collins, T.M.Reeder, H.J.Shaw, "Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit Model", IEEE Transactions On MicroWave Theory and Techniques, Vol. MTT-17, No.11, Nov 1969, pp. 856-864.
2. Warren P.Mason, "Electromechanical Transducer and Wave Filters", second edition, D.Van Nostrand Company Inc, 1948.
3. C.K.Campbell, "Surface Acoustic Wave Devices for Mobile and Wireless Communications", Academic Press, ISBN-10: 0121573400, 1998.
4. O.Tigli, M.E.Zaghloul, "A Novel SAW device in CMOS: Design, Modeling, and Fabrication", IEEE Sensors Journal, Vol.7, No.2, February 2007, pp.219-227.
5. C.Elachi, "Waves in active and passive periodic structures: A review", Proc. IEEE, vol.64, No.12, December, 1976, pp.1666-1698.
6. K.Nakamura, "A simple equivalent circuit for interdigital transducers based on the couple-mode approach", IEEE Trans on Ultrasonics, Ferroelectrics, and Frequency Control, Vol.40, No.6, November 1993, pp.763-767.
7. E.Iborra, M.Clement, J.Sangrador, A. Sanz-Hervas, L.Vergara, and M.Aguilar, "Effect of partical bombardment on the orientation and the residual stress of sputtered AlN films for SAW devices", IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.51, pp.352-358, 2004.
8. M.Clement, E.Iborra, J.Sangrador, A. Sans-Hervas, L.Vergara, and M.Aguilar, "Influence of sputtering mechanisms on the preferred orientation of aluminum nitride thin films", J.Appl.Phys., vol.94, pp.1495-1500, 2003.
9. C.A.Johnsen, T.L.Bagwell, J.L.Henderson, P.C.Bray, "Polyimide as An Acoustic Absorber For High Frequency SAW Application", IEEE Ultrasonics Symposium, 1988, pp. 279-284.
10. W.C.Qian, A.Venema, "An Acoustic Absorption Film for SAW Devices", Sensors and Actuators A, 25-27 (1.991), pp.535-539.
11. N.Tirole, A.Choujaa, D.Hauden, G.Martin, "Lamb waves pressure sensor using an AlN/Si structure", IEEE Ultrasonics Symposium, 1993, pp. 371-374.
12. G.Schimetta, F.Dollinger, G.Scholl, R.Weigel, "Optimized design and fabrication, of a wireless pressure and temperature sensor unit based on SAW transponder technology", IEEE Microwave Symposium. Digest, 2001, pp. 335-358.
13. A.N.Nordin, M.E.Zaghloul, "Modeling and Fabrication of CMOS Surface Acoustic Wave Resonators", IEEE Transactions on MicroWave Theory and Techniques, Vol.55, No.5, May 2007, pp. 992-1001.