A maskless laser-write lithography processing of thin-film transistors on a hemispherical surface

Microelectronic Engineering

Volumn 87, Issue 1, 2010, Pages 83-87

  Yoo, Geonwook ^a   Lee, Hojin ^a   Radtke, Daniela ^b   Stumpf, Marko ^b   Zeitner, Uwe ^b   Kanicki, Jerzy ^a  

^a The Department of Civil and Environmental Engineering   (United States)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Maskless lithography; Non planar surface; Thin film transistor

Indexed keywords

A-SI:H; A-SI:H TFT; CURVED SURFACES; FABRICATION METHOD; FIELD-EFFECT MOBILITIES; HEMISPHERICAL SURFACES; HYDROGENATED AMORPHOUS SILICON (A-SI:H); MASK LESS; MASKLESS LITHOGRAPHY; NON-PLANAR SUBSTRATES; NON-PLANAR SURFACE; ON/OFF CURRENT RATIO; PLANAR SENSOR ARRAY; SATURATION REGIME;

AMORPHOUS FILMS; AMORPHOUS SILICON; SEMICONDUCTING ORGANIC COMPOUNDS; SENSOR ARRAYS; THIN FILM DEVICES; THIN FILM TRANSISTORS; TRANSISTORS;

LITHOGRAPHY;

EID: 70350723444     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.05.032     Document Type: Article

References (18)

1. Takeda N. IEEE Int. MEMS Conf. (2000) 11-16
2. Lee L., and Szema R. Science 310 (2005) 1148-1150
3. Ko H.C., Stoykovich M., Song J., Malyarchuk V., Choi W.M., Yu C., Geddes III J., Xiao J., Wang S., Huang Y., and Rogers J. Nature 454 (2007) 748-753
4. Jacobs H.O., Tao A.R., Schwartz A., Gracias D.H., and Whitesides G.M. Science 296 (2002) 323-325
5. Meitl M., Zhu Z., Kumar V., Lee K.J., Feng X., Huang Y.Y., Adesida I., Nuzzo R., and Rogers J.A. Nat. Mater. 5 (2006) 33-38
6. Gleskova H., Wagner S., Gaparik V., and Kovac P. J. Electrochem. Soc. 148 (2001) G370-G374
7. Hsu P.I., Bhattacharya R., Gleskova H., Huang M., Xi Z., Suo Z., Wagner S., and Sturm J.C. Appl. Phys. Lett. 81 (2002) 1723-1725
8. Zheng W., Buhlmann P., and Jacobs H.O. Proc. Natl. Acad. Sci. 101 (2004) 12814-12817
9. Stauth S., and Parviz B.A. Proc. Natl. Acad. Sci. 103 (2006) 13922-13927
10. Wang L., Ast D.G., Bhargava P., and Zenhnder A.T. Mater. Res. Soc. Symp. Proc. 769 (2003) H2.8.1-H2.8.9
11. Rogers J. Mater. Res. Soc. Symp. Proc. 739 (2003) H1.2.1-H1.2.8
12. Erhardt M.K., and Nuzzo R.G. Langmuir 15 (1999) 2188-2193
13. Xie Y., Lu Z., Li F., Zhao J., and Weng Z. Opt. Express 10 (2002) 1043-1047
14. Radtke D., and Zeitner U.D. Opt. Express 15 (2007) 1167-1174
15. Feng X., and Sun L. Opt. Express 13 (2005) 7070-7075
16. Power M.J., Easton B.C., and Nicholis D.H. J. Appl. Phys. 53 (1982) 5068-5078
17. Ando M., Wakagi M., and Minemura T. Jpn. J. Appl. Phys. 37 (1998) 3904-3909
18. Kagan C.R. Thin-Film Transistors (2003), Marcel Dekker Inc. (Chapter 3)