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Volumn 769, Issue , 2003, Pages 59-67
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Curved Silicon Electronics
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL BONDS;
CMOS INTEGRATED CIRCUITS;
DEFORMATION;
DRY ETCHING;
ELECTRIC CONNECTORS;
ELECTROPLATING;
GOLD;
IMAGE SENSORS;
IMAGING SYSTEMS;
LENSES;
LITHOGRAPHY;
POLYMETHYL METHACRYLATES;
SILICON WAFERS;
STRENGTH OF MATERIALS;
ELECTRONIC IMAGE CONVERTERS;
PLANAR SENSORS;
SILICON;
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EID: 1542274568
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-769-h2.8 Document Type: Conference Paper |
Times cited : (3)
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References (3)
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