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Volumn 30, Issue 2, 2010, Pages 365-368

Development of PLZT dielectrics on base metal foils for embedded capacitors

Author keywords

Chemical solution deposition; Dielectric property; Ferroelectric film; PLZT

Indexed keywords

BASE METALS; BREAKDOWN FIELD; BREAKDOWN STRENGTHS; CHEMICAL SOLUTION DEPOSITION; COPPER SUBSTRATES; CU FOIL; DIELECTRIC CONSTANTS; EMBEDDED CAPACITOR; PLZT; PLZT FILMS; RELATIVE PERMITTIVITY; ROOM TEMPERATURE;

EID: 70350719154     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2009.05.006     Document Type: Article
Times cited : (29)

References (16)
  • 3
    • 70350724248 scopus 로고    scopus 로고
    • In-plane on-chip decoupling capacitors and method for making same,
    • US Patent, 6949831B2, 2005
    • Chiang, C. and Fraser, D. B., In-plane on-chip decoupling capacitors and method for making same, US Patent # 6949831B2, 2005.
    • Chiang, C.1    Fraser, D.B.2
  • 4
    • 0000880995 scopus 로고    scopus 로고
    • Laser-assisted low temperature processing of Pb(Zr,Ti)O thin film
    • Zhu Y., Zhu J., Song Y.J., and Desu S.B. Laser-assisted low temperature processing of Pb(Zr,Ti)O thin film. Appl. Phys. Lett. 73 (1998) 1958-1960
    • (1998) Appl. Phys. Lett. , vol.73 , pp. 1958-1960
    • Zhu, Y.1    Zhu, J.2    Song, Y.J.3    Desu, S.B.4
  • 5
    • 14744291962 scopus 로고    scopus 로고
    • Lead zirconate titanate thin film on copper electrodes for ferroelectric, dielectric and piezoelectric applications
    • Kingon A.I., and Srinivasan S. Lead zirconate titanate thin film on copper electrodes for ferroelectric, dielectric and piezoelectric applications. Nat. Mater. 4 (2005) 233-237
    • (2005) Nat. Mater. , vol.4 , pp. 233-237
    • Kingon, A.I.1    Srinivasan, S.2
  • 6
    • 64049102655 scopus 로고    scopus 로고
    • Dielectric strength and reliability of ferroelectric PLZT films deposited on nickel substrates
    • Ma B., Narayanan M., and Balachandran U. Dielectric strength and reliability of ferroelectric PLZT films deposited on nickel substrates. Mater. Lett. 63 (2009) 1353-1356
    • (2009) Mater. Lett. , vol.63 , pp. 1353-1356
    • Ma, B.1    Narayanan, M.2    Balachandran, U.3
  • 7
    • 0035497590 scopus 로고    scopus 로고
    • Lead zirconate titanate thin film base-metal foils: an approach for embedded high-permittivity passive components
    • Maria J.-P., Cheek K., Streiffer S.K., Kim S.-H., Dunn G., and Kingon A.I. Lead zirconate titanate thin film base-metal foils: an approach for embedded high-permittivity passive components. J. Am. Ceram. Soc. 84 (2001) 2436-2438
    • (2001) J. Am. Ceram. Soc. , vol.84 , pp. 2436-2438
    • Maria, J.-P.1    Cheek, K.2    Streiffer, S.K.3    Kim, S.-H.4    Dunn, G.5    Kingon, A.I.6
  • 9
    • 44349145030 scopus 로고    scopus 로고
    • Dielectric properties of film-on-foil capacitors
    • Ma B., Kwon D.K., Narayanan M., and Balachandran U. Dielectric properties of film-on-foil capacitors. Mater. Lett. 62 (2008) 3573-3575
    • (2008) Mater. Lett. , vol.62 , pp. 3573-3575
    • Ma, B.1    Kwon, D.K.2    Narayanan, M.3    Balachandran, U.4
  • 10
    • 46049116867 scopus 로고    scopus 로고
    • Deposition of sol-gel derived lead lanthanum zirconate titanate thin film on copper substrates
    • Narayanan M., Kwon D.K., Ma B., and Balachandran U. Deposition of sol-gel derived lead lanthanum zirconate titanate thin film on copper substrates. Appl. Phys. Lett. 92 (2008) 252905
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 252905
    • Narayanan, M.1    Kwon, D.K.2    Ma, B.3    Balachandran, U.4
  • 11
    • 84987277478 scopus 로고
    • 3 ferroelectric ceramics for electrooptic applications
    • 3 ferroelectric ceramics for electrooptic applications. J. Am. Ceram. Soc. 54 (1971) 1-11
    • (1971) J. Am. Ceram. Soc. , vol.54 , pp. 1-11
    • Haertling, G.H.1    Land, C.E.2
  • 12
    • 36449003098 scopus 로고
    • Dielectric properties of tetragonal lanthanum modified lead zirconate titanate ceramics
    • Dai X., DiGiovanni A., and Viehland D. Dielectric properties of tetragonal lanthanum modified lead zirconate titanate ceramics. J. Appl. Phys. 74 (1993) 3399-3405
    • (1993) J. Appl. Phys. , vol.74 , pp. 3399-3405
    • Dai, X.1    DiGiovanni, A.2    Viehland, D.3
  • 14
    • 84987266075 scopus 로고
    • A statistical distribution functions of wide applicability
    • Weibull W. A statistical distribution functions of wide applicability. J. Appl. Mech. 18 (1951) 293-297
    • (1951) J. Appl. Mech. , vol.18 , pp. 293-297
    • Weibull, W.1
  • 15
    • 0025531419 scopus 로고
    • Theoretical basis for the statistics of dielectric breakdown
    • Dissado L.A. Theoretical basis for the statistics of dielectric breakdown. J. Phys. D: Appl. Phys. 23 (1990) 1582-1591
    • (1990) J. Phys. D: Appl. Phys. , vol.23 , pp. 1582-1591
    • Dissado, L.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.