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Volumn 84, Issue 10, 2001, Pages 2436-2438

Lead Zirconate Titanate Thin Films on Base-Metal Foils: An Approach for Embedded High-Permittivity Passive Components

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; CRYSTALLIZATION; DIELECTRIC FILMS; FILM PREPARATION; HIGH TEMPERATURE EFFECTS; LAMINATES; METAL FOIL; NICKEL; PERMITTIVITY; REDUCTION; SPUTTER DEPOSITION;

EID: 0035497590     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2001.tb01029.x     Document Type: Article
Times cited : (99)

References (18)
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  • 3
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  • 5
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    • 2 Heterostructures on Si (001) Using Low-Temperature Metalorganic Chemical Vapor Deposition
    • 2 Heterostructures on Si (001) Using Low-Temperature Metalorganic Chemical Vapor Deposition," Integr. Ferroelectr., 14 [1-4] 23-31 (1997).
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  • 7
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    • Institute of Electrical and Electronic Engineers, Piscataway, NJ
    • K. Fairchild, G. Morcan, T. Lenihan, W. Brown, L. Schaper, and S. Ang, "Reliability of Flexible Thin-Film Embedded Resistors and Electrical Characterization of Thin Film Embedded Capacitors and Inductors"; pp. 730-38 in Proceedings of the 47th IEEE Electronic Components and Technology Conference. Institute of Electrical and Electronic Engineers, Piscataway, NJ, 1997.
    • (1997) Proceedings of the 47th IEEE Electronic Components and Technology Conference , pp. 730-738
    • Fairchild, K.1    Morcan, G.2    Lenihan, T.3    Brown, W.4    Schaper, L.5    Ang, S.6
  • 10
    • 0031277374 scopus 로고    scopus 로고
    • Preparation and Electrical Properties of Sol-Gel Derived Lead Zirconate Titanate Glass Ceramic Thin Films on Metal Foil Substrates
    • K. Saegusa, "Preparation and Electrical Properties of Sol-Gel Derived Lead Zirconate Titanate Glass Ceramic Thin Films on Metal Foil Substrates," Jpn. J. Appl. Phys. Part 1, 30 [11] 6888-93 (1997).
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  • 11
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    • Dielectric Properties of Lead Zirconate Titanate Thin Films Deposited on Metal Foils
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  • 12
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    • 3 Thin Films on Stainless Steel by Excimer Laser Liftoff
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  • 15
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    • K. B. Lee, B. R. Rhee, and S. K. Cho, "Effect of Surface Morphology of NiCr Bottom Electrode on Preparation of Ferroelectric PZT Thin Film Capacitor," Mater. Res. Soc. Symp. Proc., 433, 181-86 (1996).
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.