New Love wave liquid sensor operating at 2 GHz using an integrated micro-flow channel

Measurement Science and Technology

Volumn 20, Issue 9, 2009, Pages

  Assouar, M B ^a   Kirsch, P ^a   Alnot, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Advanced device integration; High frequency; Love wave liquid sensors; Micro flow channel

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; CHANNEL FLOW; ELECTRON BEAM LITHOGRAPHY; FLOW MEASURING INSTRUMENTS; LIQUIDS; MICROCHANNELS; ULTRASONIC TRANSDUCERS;

DETECTION MECHANISM; DEVICE INTEGRATION; HIGH FREQUENCY HF; INTERDIGITAL TRANSDUCER; LIQUID SENSORS; MICRO FLOW CHANNELS; SENSOR APPLICATIONS; SURFACE ACOUSTIC WAVES;

SHEAR FLOW;

EID: 70350664354     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/9/095203     Document Type: Article

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