Large-scale Ar and N2-Ar microwave plasma sources

Journal of Physics D: Applied Physics

Volumn 39, Issue 13, 2006, Pages 2747-2753

  Tatarova, E ^a   Dias, F M ^a   Henriques, J ^a   Ferreira, C M ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; LIGHT EMISSION; PLASMA SOURCES; SLOT ANTENNAS; SPECTROSCOPIC ANALYSIS;

ELECTRIC FIELD PATTERN; MICROWAVE FIELD INTENSITY; OPTICAL EMISSION SPECTROSCOPY; SPATIAL STRUCTURE;

MICROWAVES;

EID: 33745319471     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/13/018     Document Type: Article

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