Nitrogen dissociation in N2-Ar microwave plasmas

Vacuum

Volumn 69, Issue 1-3, 2002, Pages 177-181

  Henriques, J ^a   Tatarova, E ^a   Guerra, V ^a   Ferreira, C M ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Argon; Atoms; Dissociation; Modelling; Nitrogen

Indexed keywords

DISSOCIATION; ELECTRODYNAMICS; MICROWAVES; NITROGEN; PLASMAS;

MICROWAVE PLASMAS;

VACUUM APPLICATIONS;

EID: 0037168576     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00328-7     Document Type: Conference Paper

References (8)

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