A large-scale Ar plasma source excited by a TM330 mode

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 III, 2005, Pages 866-875

  Tatarova, Elena ^a   Dias, Francisco M ^a   Henriques, Júlio ^a   Ferreira, Carlos M ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Kinetic modeling; Large scale source; Microwave discharge; Surface waves

Indexed keywords

ARGON; ELECTRIC FIELD EFFECTS; ELECTRODYNAMICS; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; EQUATIONS OF MOTION; GAS DISCHARGE TUBES; KINETIC ENERGY; MATHEMATICAL MODELS; MICROWAVE DEVICES; SLOT ANTENNAS; SURFACE WAVES;

ARGON PLASMA SOURCE; BOLTZMANN EQUATION; GAS THERMAL BALANCE EQUATION; KINETIC MODELING; LARGE SCALE SOURCE; MICROWAVE DISCHARGE; SELF CONSISTENT THEORETICAL MODEL; SLOT ANTENNA EXCITED PLASMA SOURCE;

PLASMA SOURCES;

EID: 18844378073     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845090     Document Type: Article

References (19)

1. H. Sugai, I. Ghanashev, and M. Nagatsu, "High-density flat plasma production based on surface waves," Plasma Sources Sci. Technol., vol. 7, pp. 192-205, 1998.
2. 2 high frequency discharge," Plasma Sources Sci. Technol., vol. 7, pp. 550-556, 1998.
3. 2 microwave flowing discharges and post-discharges," Surface Coat. Technol., vol. 142-144, pp. 333-336, 2001.
4. B. Gordiets, M. Pinheiro, E. Tatarova, F. M. Dias, C. M. Ferreira, and A. Ricard, "A travelling wave sustained hydrogen discharge: Modeling and experiment," Plasma Sources Sci. Technol., vol. 9, pp. 295-303, 2000.
5. + ) in a nitrogen afterglow," J. Phys. D, Appl. Phys., vol. 31, pp. 2521-2531, 1998.
6. E. Tatarova, F. M. Dias, C. M. Ferreira, and A. Ricard, "On the axial structure of a nitrogen surface wave sustained discharge: Theory and experiment," J. Appl. Phys., vol. 85, pp. 49-62, 1999.
7. V. Guerra, E. Tatarova, F. M. Dias, and C. M. Ferreira, "On the self-consistent modeling of a travelling wave sustained nitrogen discharge," J. Appl. Phys., vol. 91, pp. 49-62, 2002.
8. 2-Ar) discharges as atomic sources," IEEE Trans. Plasma Sci., vol. 41, no. 4, pp. 645-658, Aug. 2003.
9. V. Guerra, F. M. Dias, J. Loureiro, P. A. Sá, P. Supiot, C. Dupret, and T. Popov, "Time-dependence of the electron energy distribution function in the nitrogen afterglow," IEEE Trans. Plasma Sci., vol. 41, no. 4, pp. 542-552, Aug. 2003.
10. A. Ricard, J. E. Oseguera-Pena, L. Falk, H. Michel, and M. Gantois, "Active species in microwave postdischarge for steel-surface nitriding," IEEE Trans. Plasma Sci., vol. 18, no. 6, pp. 940-944, Dec. 1990.
11. I. Ganashev, M. Nagatsu, and H. Sugai, "Surface wave eigenmodes in a finite-area plane microwave plasma," Jpn. J. Appl. Phys., vol. 36, pp. 337-344, 1997.
12. I. Ghanashev and H. Sugai, "Multiple eigenmode analysis and density jumps in planar surface-wave plasmas with slot-antenna excitation," Phys. Plasmas, vol. 7, pp. 3051-3061, 2000.
13. C. M. Ferreira, B. Gordiets, and E. Tatarova, "Kinetic theory of low-temperature plasmas in molecular gases," Plasma Phys. Control. Fusion, vol. 42, p. B165, 2000.
14. F. M. Dias, E. Tatarova, and C. M. Ferreira, "Spatially resolved experimental investigation of a surface wave sustained discharge in nitrogen," J. Appl. Phys., vol. 83, pp. 4602-4609, 1998.
15. C. M. Ferreira, L. L. Alves, M. Pinheiro, and A. B. Sa, "Modeling of low-pressure microwave discharges in Ar, He and O2: Similarity law for the maintenance field and mean power transfer," IEEE Trans. Plasma Sci., vol. 19, no. 2, pp. 229-239, Apr. 1991.
16. J. Henriques, E. Tatarova, F. M. Dias, and C. M. Ferreira, "Effect of gas heating on the spatial structure of a traveling wave sustained Ar discharge," J. Appl. Phys., vol. 90, pp. 4921-4928, 2001.
17. P. M. Sa, "Estudo de Plasmas de Argon Mantidos por Campos Eléctricos Continuos e Alternados de Alta Frequência," Ph.D. dissertation (in Portuguesse), Univ. Técnica de Lisboa, Instituto Superior Técnico, Lisbon, Portugal, 1994.
18. 2-Ar discharge. I. Self-consistent theoretical model," J. Appl. Phys., vol. 91, pp. 5622-5631, 2002.
19. V. E. Golant, A. P. Zhilinsky, and I. E. Sakharov, Fundamentals of Plasma Physics. Moscow, Russia: Atomizdat, 1977.