Mechanical design for tailoring the resonance harmonics of an atomic force microscope cantilever during tip-surface contact

Journal of Micromechanics and Microengineering

Volumn 19, Issue 11, 2009, Pages

  Felts, Jonathan R ^a   King, William P ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPE CANTILEVERS; DYNAMIC CONTACTS; FINITE ELEMENT ANALYSIS; FLEXURAL MODES; IMPROVE-A; MECHANICAL DESIGN; MODE FREQUENCIES; RESONANCE HARMONICS; RESONANT MODE; SURFACE CONTACT;

ATOMIC FORCE MICROSCOPY;

NANOCANTILEVERS;

EID: 70350625267     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/115008     Document Type: Article

References (20)

1. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930-3
2. Zhong Q et al 1993 Fractured polymer silica fiber surface studied by tapping mode atomic-force microscopy Surf. Sci. 290 L688-92
3. Rabe U, Janser K and Arnold W 1996 Vibrations of free and surface-coupled atomic force microscope cantilevers: theory and experiment Rev. Sci. Instrum. 67 3281-93
4. Gruverman A, Auciello O and Tokumoto H 1996 Scanning force microscopy for the study of domain structure in ferroelectric thin films J. Vac. Sci. Technol. B 14 602-5 (Pubitemid 126586473)
5. Varesi J and Majumdar A 1998 Scanning Joule expansion microscopy at nanometer scales Appl. Phys. Lett. 72 37-9
6. Daniel Frisbie C et al 1994 Functional group imaging by chemical force microscopy Science 265 2071-4
7. Rabe U et al 2000 Quantitative determination of contact stiffness using atomic force acoustic microscopy Ultrasonics 38 430-7
8. Stark R W, Drobek T and Heckl W M 1999 Tapping-mode atomic force microscopy and phase-imaging in higher eigenmodes Appl. Phys. Lett. 74 3296-8
9. Rinaldi G, Packirisamy M and Stiharu I 2008 Frequency tuning AFM optical levers using a slot Microsyst. Technol. 14 361-9
10. Rinaldi G, Packirisamy M and Stiharu I 2007 Tuning the dynamic behaviour of cantilever MEMS based sensors and actuators Sens. Rev. 27 142-50
11. Zeyen B et al 2009 Preamplifying cantilevers for dynamic atomic force microscopy Appl. Phys. Lett. 94 3
12. Sadewasser S, Villanueva G and Plaza J A 2006 Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy Appl. Phys. Lett. 89 3
13. Sahin O et al 2004 High-resolution imaging of elastic properties using harmonic cantilevers Sensors Actuators A 114 183-90
14. Hodges A R, Bussmann K M and Hoh J H 2001 Improved atomic force microscope cantilever performance by ion beam modification Rev. Sci. Instrum. 72 3880-3
15. Maali A et al 2006 Reduction of the cantilever hydrodynamic damping near a surface by ion-beam milling J. Appl. Phys. 99 024908
16. Li Huiling, Chen Yan and Dai Lanhong 2008 Concentrated-mass cantilever enhances multiple harmonics in tapping-mode atomic force microscopy Appl. Phys. Lett. 92 151903
17. Fernando S, Austin M and Chaffey J 2007 Improved cantilever profiles for sensor elements J. Phys. D: Appl. Phys. 40 7652-5
18. Stark R W 2004 Optical lever detection in higher eigenmode dynamic atomic force microscopy Rev. Sci. Instrum. 75 5053-5
19. Butt H J and Jaschke M 1995 Calculation of thermal noise in atomic force microscopy Nanotechnology 6 1-7
20. Holbery J D et al 2000 Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus Rev. Sci. Instrum. 71 3769-76