High-frequency micromechanical columnar resonators

Science and Technology of Advanced Materials

Volumn 10, Issue 3, 2009, Pages

  Kehrbusch, Jenny ^a   Ilin, Elena A ^a   Bozek, Peter ^a   Radzio, Bernhard ^a   Oesterschulze, Egbert ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

Cantilever; Frequency stability; Mass sensor; Microcolumn; Microresonator; Molecular mass; Resonators in viscous fluids

Indexed keywords

AMBIENT CONDITIONS; AMBIENT GAS; CANTILEVER; CONSTANT TEMPERATURE; ENVIRONMENTAL CONDITIONS; FLEXURAL MODES; HIGH FREQUENCY HF; LATERAL DIMENSION; LINEAR DEPENDENCE; MASS SENSOR; MECHANICAL RESONATORS; MICRO RESONATORS; MICRO-MECHANICAL; MICROCOLUMN; MICROCOLUMNS; MICRORESONATOR; PRESSURE REGIME; QUALITY FACTORS; RESONANT FREQUENCIES; SQUARE ROOTS; TECHNOLOGICAL SCHEME; TEMPERATURE SHIFT; VISCOUS DAMPING MODEL;

ATOMIC FORCE MICROSCOPY; FREQUENCY STABILITY; MECHANICAL PROPERTIES; MOLECULAR MASS; NANOCANTILEVERS; NATURAL FREQUENCIES; SENSORS; VISCOUS FLOW;

RESONATORS;

EID: 70350233597     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/10/3/034601     Document Type: Article

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