Design, fabrication and testing of a novel MEMS resonator for mass sensing applications

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1601-1605

  Davis, Zachary J ^a   Svendsen, Winnie ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Electro mechanical devices; Micro and nanomechanical devices; Microelectromechanical systems (MEMS); Nanomechanics

Indexed keywords

FINITE ELEMENT METHOD; MEMS; OPTIMIZATION; Q FACTOR MEASUREMENT; SENSITIVITY ANALYSIS;

CANTILEVER DEVICES; GAS BASED MEASUREMENTS; MECHANICAL DESIGN; NANOMECHANICAL DEVICES;

RESONATORS;

EID: 34247608242     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.199     Document Type: Article

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