Piezoelectric actuation of all-nitride MEMS

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 6, 2008, Pages 1910-1913

  Tonisch, K ^a   Buchheim, C ^a   Niebelschutz F ^a   Donahue, M ^a   Goldhahn, R ^a   Cimalla, V ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

2D ELECTRON GAS; ACTIVE LAYER; ALGAN; ALGAN LAYERS; ALGAN/GAN; BACK ELECTRODE; ELECTRICAL FIELD DISTRIBUTIONS; ELECTROREFLECTANCE; GAN LAYERS; HETEROSTRUCTURES; MECHANICAL OSCILLATIONS; MEMS TECHNOLOGY; PIEZOELECTRIC ACTUATION; PIEZOELECTRIC FORCE MICROSCOPY; PIEZOELECTRIC RESPONSE;

ELECTRON GAS; GALLIUM ALLOYS; GALLIUM NITRIDE; PHASE INTERFACES; PIEZOELECTRICITY;

HETEROJUNCTIONS;

EID: 63649094416     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200778423     Document Type: Conference Paper

References (8)

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