High frequency columnar silicon microresonators for mass detection

Applied Physics Letters

Volumn 93, Issue 2, 2008, Pages

  Kehrbusch, J ^a   Ilin, E A ^a   Hullin, M ^a   Oesterschulze, E ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL PROPERTIES; NATURAL FREQUENCIES; NONMETALS; OPTICAL DESIGN;

AMERICAN INSTITUTE OF PHYSICS (AIP); FLEXURAL MODES; HIGH-FREQUENCY (HF); MASS BALANCING; MASS DETECTION; MICRO-RESONATORS; QUALITY FACTOR (Q FACTOR); RESONANT FREQUENCIES; SILICON MICRORESONATORS; TECHNOLOGICAL SCHEME; VACUUM CONDITIONS;

SILICON;

EID: 47549115388     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2957653     Document Type: Article

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