Compensation for five DOF motion errors of hydrostatic feed table by utilizing actively controlled capillaries

Precision Engineering

Volumn 30, Issue 3, 2006, Pages 299-305

  Park, Chun Hong ^a   Oh, Yoon Jin ^a   Shamoto, Eiji ^b   Lee, Deug Woo ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b NAGOYA UNIVERSITY   (Japan)

^c Pusan National University   (South Korea)

Author keywords

Actively controlled capillary; Five DOF motion errors; Hydrostatic table; Measuring accuracy; Motion error compensation; Sequential two point method

Indexed keywords

CAPILLARITY; CONTROL EQUIPMENT; DEGREES OF FREEDOM (MECHANICS); ERROR COMPENSATION; INTERFEROMETERS; ITERATIVE METHODS; LINEAR MOTORS;

ACTIVELY CONTROLLED CAPILLARY; FIVE DOF MOTION ERRORS; HYDROSTATIC TABLE; MEASURING ACCURACY; MOTION ERROR COMPENSATION; SEQUENTIAL TWO-POINT METHOD;

MOTION COMPENSATION;

EID: 33746913902     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2005.10.002     Document Type: Article

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