Modeling and validation of electrostatic actuation in aqueous ionic media

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 467-470

  Mukundan, V ^a   Ponce, P ^a   Butterfield, H E ^a   Pruitt, B L ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CIRCUIT SIMULATION; COMPOSITE MICROMECHANICS; ELECTROSTATIC ACCELERATORS; ELECTROSTATICS; FORECASTING; FREQUENCY RESPONSE; IONIZATION OF LIQUIDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

BIOLOGICAL ENVIRONMENTS; CHARACTERISTIC FREQUENCIES; CIRCUIT COMPONENTS; CIRCUIT MODELING; ELECTRIC DOUBLE LAYER; ELECTROSTATIC ACTUATIONS; FORCE RESPONSES; FREQUENCY-DEPENDENT; IMPEDANCE CHARACTERISTICS; INTERNATIONAL CONFERENCES; IONIC MEDIUM; LIQUID MEDIUMS; MICRO-ELECTRO MECHANICAL SYSTEMS; MODELING AND VALIDATION; TEST STRUCTURES;

ELECTROSTATIC ACTUATORS;

EID: 50149120570     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443694     Document Type: Conference Paper

References (12)

1. W. C. Tang, T.-C. H. Nguyen, M. W. Judy, and R. T. Howe, "Electrostatic-comb drive of lateral polysilicon resonators," Sensors and Actuators A: Physical, vol. 21, pp. 328-331, 1990.
2. W. C. Tang, M. G. Lin, and R. T. Howe, "Electrostatic Comb Drive Levitation and Control Method," Journal of Microelectromechanical Sytems, vol. 1, 1992.
3. R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, "Comb-drive actuators for large displacements," Journal of Micromechanics and microengineering, vol. 6, pp. 320-329, 1996.
4. T. L. Sounart, T. A. Michalske, and K. R. Zavadil, "Frequency- Dependent Electrostatic Actuation in Microfluidic MEMS," Journal of Microelectromechanical Sytems, vol. 14, pp. 125-133, 2005.
5. A.-S. Rollier, B. Legrand, D. Collard, and L. Buchaillot, "The Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions," Journal of Micromechanics and microengineering, vol. 16, pp. 794-801, 2006.
6. B. Legrand, A. S. Rollier, D. Collard, and L. Buchaillot, "Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids," Applied Physics Letters, vol. 88, 2006.
7. T. Adrega, V. Chu, and J. P. Conde, "Resonance of electrostatically actuated thin-film amorphous silicon microelectromechanical systems microresonators in aqueous solutions: Effect of solution conductivity and viscosity," Journal of Applied Physics, vol. 101, 2007.
8. T. Adrega, V. Chu, and J. P. Conde, "Electrostatically actuated resonance of amorphous silicon microresonators in water," Applied Physics Letters, vol. 89, 2006.
9. H. V. Panchawagh, D. Serrell, D. S. Finch, T. Oreskovic, and R. L. Mahajan, "Design and Characterization of a BioMEMS device for invitro mechanical simulation of single adherent cells," presented at ASME International Mechanical Engineering Congress and Expedition, Orlando, 2005.
10. V. Mukundan and B. L. Pruitt, "Experimental Characterization of Frequency Dependent Electrostatic Actuator for Aqueous Media," presented at Solid State Sensors and Actuators, Hilton Head Island, 2006.
11. V. Mukundan and B. L. Pruitt, "Differential Electrode Design for Electrostatic Actuator in Conducting Media," presented at Transducers 2007, Lyon, France, 2007.
12. M. Z. Bazant, K. Thornton, and A. Ajdari, "Diffuse-charge Dynamics in Electrochemical Systems," Physical Review E, vol. 70, pp. 021506-1-23, 2004.