A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method

Sensors and Actuators, A: Physical

Volumn 143, Issue 2, 2008, Pages 469-474

  Wang, Xuan Yu ^a   Lee, Chi Yuan ^b   Peng, Cheng Jien ^c   Chen, Pei Yen ^d   Chang, Pei Zen ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Aerosol deposition method; PZT thick film

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; LINEWIDTH; LOW TEMPERATURE EFFECTS; MEMS; NATURAL FREQUENCIES;

AEROSOL DEPOSITION METHOD; CANTILEVER RESONATORS;

THICK FILMS;

EID: 41349116956     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.11.027     Document Type: Article

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