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Journal of Applied Physics

Volumn 106, Issue 6, 2009, Pages

In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers

(5) Van Bockstael, C a Detavernier, C a Van Meirhaeghe, R L a Jordan Sweet, J L b Lavoie, C b

a GHENT UNIVERSITY (Belgium)

b IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX SEQUENCES; COMPOSITION RANGES; HEXAGONAL PHASE; HIGH TEMPERATURE; IN-SITU; IN-SITU STUDY; LOW TEMPERATURE PHASE; LOW TEMPERATURES; MIXED LAYER; MIXTURE COMPOSITIONS; NI FILMS; NI-SI SYSTEM; NI-SILICIDE; OXIDE SUBSTRATES; PHASE FORMATION SEQUENCE; PHASE FORMATIONS; POLE FIGURE; SI CONTENT; SI FILMS; SI(1 0 0); SINGLE PHASE;

MIXTURES; NICKEL; NICKEL COMPOUNDS; SILICIDES; SILICON; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS SILICON;

EID: 70349798655 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3194318 Document Type: Article

Times cited : (11)

References (18)

1
- 28044454327
- 0167-9317,. 10.1016/j.mee.2005.07.084
- J. A. Kittl, A. Lauwers, M. A. Pawlak, M. J. H. van Dal, A. Veloso, K. G. Anil, G. Pourtois, C. Demeurisse, T. Schram, B. Brijs, M. de Potter, C. Vrancken, and K. Maex, Microelectron. Eng. 0167-9317 82, 441 (2005). 10.1016/j.mee.2005.07.084
- (2005) Microelectron. Eng. , vol.82 , pp. 441
- Kittl, J.A.¹ Lauwers, A.² Pawlak, M.A.³ Van Dal, M.J.H.⁴ Veloso, A.⁵ Anil, K.G.⁶ Pourtois, G.⁷ Demeurisse, C.⁸ Schram, T.⁹ Brijs, B.¹⁰ De Potter, M.¹¹ Vrancken, C.¹² Maex, K.¹³

2
- 0142055828
- 0167-9317,. 10.1016/S0167-9317(03)00380-0
- C. Lavoie, F. M. d'Heurle, C. Detavernier, and C. Cabral, Microelectron. Eng. 0167-9317 70, 144 (2003). 10.1016/S0167-9317(03)00380-0
- (2003) Microelectron. Eng. , vol.70 , pp. 144
- Lavoie, C.¹ D'Heurle, F.M.² Detavernier, C.³ Cabral, C.⁴

3
- 0035780908
- 1012-0386,. 10.4028/www.scientific.net/DDF.194-199.1477
- C. Lavoie, C. Cabral, Jr., F. M. d'Heurle, and J. M. E. Harper, Defect Diffus. Forum 1012-0386 194-199, 1477 (2001). 10.4028/www.scientific.net/DDF. 194-199.1477
- (2001) Defect Diffus. Forum , vol.194-199 , pp. 1477
- Lavoie, C.¹ Cabral Jr., C.² D'Heurle, F.M.³ Harper, J.M.E.⁴

4
- 24044495350
- 1012-0386.
- C. Lavoie, C. Coia, F. M. d'Heurle, C. Detavernier, C. Cabral, Jr., P. Desjardins, and A. J. Kellock, Defect Diffus. Forum 1012-0386 237, 825 (2004).
- (2004) Defect Diffus. Forum , vol.237 , pp. 825
- Lavoie, C.¹ Coia, C.² D'Heurle, F.M.³ Detavernier, C.⁴ Cabral Jr., C.⁵ Desjardins, P.⁶ Kellock, A.J.⁷

5
- 33751307441
- Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films
- DOI 10.1016/j.mee.2006.09.006, PII S0167931706004734
- C. Lavoie, C. Detavernier, C. Cabral, Jr., F. M. d'Heurle, A. J. Kellock, J. Jordan-Sweet, and J. M. E. Harper, Microelectron. Eng. 0167-9317 83, 2042 (2006). 10.1016/j.mee.2006.09.006 (Pubitemid 44803167)
- (2006) Microelectronic Engineering , vol.83 , Issue.11-12 , pp. 2042-2054
- Lavoie, C.¹ Detavernier, C.² Cabral Jr., C.³ D'Heurle, F.M.⁴ Kellock, A.J.⁵ Jordan-Sweet, J.⁶ Harper, J.M.E.⁷

6
- 0037748554
- 0003-6951,. 10.1063/1.97188
- M. Natan, Appl. Phys. Lett. 0003-6951 49, 257 (1986). 10.1063/1.97188
- (1986) Appl. Phys. Lett. , vol.49 , pp. 257
- Natan, M.¹

7
- 0242385628
- 0003-6951
- J. M. Jensen, S. Ly, X. Kyablue, D. C. Johnson, Mat. Res. Soc. Symp. Proc. 755, DD10.7.1 (2003). 0003-6951
- (2003) Mat. Res. Soc. Symp. Proc. , vol.755 , pp. 1071
- Jensen, J.M.¹ Ly, S.² Kyablue, X.³ Johnson, D.C.⁴

8
- 35548959131
- Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully silicided gate applications
- DOI 10.1063/1.2799247
- J. Kittl, M. A. Pawlak, C. Torregiani, A. Lauwers, C. Demeurisse, C. Vrancken, P. Absil, S. Biesemens, C. Detavernier, J. L. Jordan-Sweet, and C. Lavoie, Appl. Phys. Lett. 0003-6951 91, 172108 (2007). 10.1063/1.2799247 (Pubitemid 350015234)
- (2007) Applied Physics Letters , vol.91 , Issue.17 , pp. 172108
- Kittl, J.A.¹ Pawlak, M.A.² Torregiani, C.³ Lauwers, A.⁴ Demeurisse, C.⁵ Vrancken, C.⁶ Absil, P.P.⁷ Biesemans, S.⁸ Coia, C.⁹ Detavernier, C.¹⁰ Jordan-Sweet, J.¹¹ Lavoie, C.¹²

9
- 34248583030
- Direct evidence of linewidth effect: Ni31 Si12 and Ni3 Si formation on 25 nm Ni fully silicided gates
- DOI 10.1063/1.2732820
- J. A. Kittl, A. Lauwers, C. Demeurisse, C. Vrancken, S. Kubicek, P. Absil, and S. Biesemans, Appl. Phys. Lett. 0003-6951 90, 172107 (2007). 10.1063/1.2732820 (Pubitemid 46748353)
- (2007) Applied Physics Letters , vol.90 , Issue.17 , pp. 172107
- Kittl, J.A.¹ Lauwers, A.² Demeurisse, C.³ Vrancken, C.⁴ Kubicek, S.⁵ Absil, P.⁶ Biesemans, S.⁷

10
- 0030401968
- Prediction of suicide formation and stability using heats of formation
- DOI 10.1016/S0040-6090(96)09022-0, PII S0040609096090220
- R. Pretorius, Thin Solid Films 0040-6090 290-291, 477 (1996). 10.1016/S0040-6090(96)09022-0 (Pubitemid 126391140)
- (1996) Thin Solid Films , vol.290-291 , pp. 477-484
- Pretorius, R.¹

11
- 0032661532
- 1040-8436,. 10.1080/10408439991329161
- R. Pretorius, C. Theron, A. Vantomme, and J. W. Mayer, Crit. Rev. Solid State Mater. Sci. 1040-8436 24, 1 (1999). 10.1080/10408439991329161
- (1999) Crit. Rev. Solid State Mater. Sci. , vol.24 , pp. 1
- Pretorius, R.¹ Theron, C.² Vantomme, A.³ Mayer, J.W.⁴

12
- 70349828601
- JCPDS Pattern No. 01-080-2283.
- JCPDS Pattern No. 01-080-2283.

13
- 0018505847
- EINIGE STRUKTURELLE UNTERSUCHUNGEN IN DER MISCHUNG NiSi//N.
- DOI 10.1016/0022-5088(79)90226-1
- M. Ellner, S. Heinreich, M. K. Bhargava, and K. Schubert, J. Less-Common Met. 0022-5088 66, 163 (1979). 10.1016/0022-5088(79)90226-1 (Pubitemid 10404875)
- (1979) Journal of the less-common metals , vol.66 , Issue.2 , pp. 163-173
- Ellner, M.¹ Heinrich, S.² Bhargava, M.K.³ Schubert, K.⁴

14
- 70349798003
- 0021-8979 (in preparation).
- S. Gaudet, P. Desjardins, and C. Lavoie, J. Appl. Phys. 0021-8979 (in preparation).
- J. Appl. Phys.
- Gaudet, S.¹ Desjardins, P.² Lavoie, C.³

15
- 84974231646
- 0884-2914,. 10.1557/JMR.1988.0167
- F. M. d'Heurle, J. Mater. Res. 0884-2914 3, 167 (1988). 10.1557/JMR.1988.0167
- (1988) J. Mater. Res. , vol.3 , pp. 167
- D'Heurle, F.M.¹

16
- 48249108309
- 1099-0062,. 10.1149/1.2955580
- K. De Keyser, C. Van Bockstael, C. Detavernier, R. L. Van Meirhaeghe, J. Jordan-Sweet, and C. Lavoie, Electrochem. Solid-State Lett. 1099-0062 11, H266 (2008). 10.1149/1.2955580
- (2008) Electrochem. Solid-State Lett. , vol.11 , pp. 266
- De Keyser, K.¹ Van Bockstael, C.² Detavernier, C.³ Van Meirhaeghe, R.L.⁴ Jordan-Sweet, J.⁵ Lavoie, C.⁶

17
- 0346258044
- An off-normal fibre-like texture in thin films on single-crystal substrates
- DOI 10.1038/nature02198
- C. Detavernier, A. S. Özcan, J. Jordan-Sweet, E. A. Stach, J. Tersoff, F. M. Ross, and C. Lavoie, Nature (London) 0028-0836 426, 641 (2003). 10.1038/nature02198 (Pubitemid 38009367)
- (2003) Nature , vol.426 , Issue.6967 , pp. 641-645
- Detavernier, C.¹ Ozcan, A.S.² Jordan-Sweet, J.³ Stach, E.A.⁴ Tersoff, J.⁵ Ross, F.M.⁶ Lavoie, C.⁷

18
- 58849160568
- 0003-6951,. 10.1063/1.3073750
- C. Van Bockstael, K. De Keyser, R. L. Van Meirhaeghe, C. Detavernier, J. L. Jordan-Sweet, and C. Lavoie, Appl. Phys. Lett. 0003-6951 94, 033504 (2009). 10.1063/1.3073750
- (2009) Appl. Phys. Lett. , vol.94 , pp. 033504
- Van Bockstael, C.¹ De Keyser, K.² Van Meirhaeghe, R.L.³ Detavernier, C.⁴ Jordan-Sweet, J.L.⁵ Lavoie, C.⁶

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