SCOPUS 정보 검색 플랫폼

Electrochemical and Solid-State Letters

Volumn 11, Issue 9, 2008, Pages

Epitaxial formation of a metastable hexagonal nickel-silicide

(6) De Keyser, K a Van Bockstael, C a Detavernier, C a Van Meirhaeghe, R L a Jordan Sweet, J b Lavoie, C b

a GHENT UNIVERSITY (Belgium)

b IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; EPITAXIAL LAYERS; METASTABLE PHASES; MIXING; MOLECULAR BEAM EPITAXY; NICKEL; NICKEL ALLOYS; NICKEL COMPOUNDS; PHASE DIAGRAMS; PHASE INTERFACES; PHASE STABILITY; SILICON; SPUTTERING;

CO DEPOSITED LAYERS; CODEPOSITED; DEPOSITED FILMS; ELECTROCHEMICAL SOCIETY (ECS); EPITAXIAL FORMATION; METASTABLE PHASE; MIXING LAYERS; NICKEL SILICIDE (NISI); ROOM-TEMPERATURE (RT); SI (111); SI(1 0 0 ); SI(2 1 1) SUBSTRATES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 48249108309 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.2955580 Document Type: Article

Times cited : (41)

References (13)

1
- 0142055828
- 0167-9317 10.1016/S0167-9317(03)00380-0.
- C. Lavoie, F. M. d'Heurle, C. Detavernier, and C. Cabral, Microelectron. Eng. 0167-9317 10.1016/S0167-9317(03)00380-0, 70, 144 (2003).
- (2003) Microelectron. Eng. , vol.70 , pp. 144
- Lavoie, C.¹ D'Heurle, F.M.² Detavernier, C.³ Cabral, C.⁴

2
- 10644282991
- A. Lauwers, J. A. Kittl, and M. J. H. Van Dal, Mater. Sci. Eng., B, 114-115, 29 (2004).
- (2004) Mater. Sci. Eng., B , vol.114-115 , pp. 29
- Lauwers, A.¹ Kittl, J.A.² Van Dal, M.J.H.³

3
- 26144465519
- 0920-2307 10.1016/0920-2307(92)90003-J.
- H. von Känel, Mater. Sci. Rep. 0920-2307 10.1016/0920-2307(92)90003- J, 8, 193 (1992).
- (1992) Mater. Sci. Rep. , vol.8 , pp. 193
- Von Känel, H.¹

4
- 24044495350
- 0015-8321
- C. Lavoie, C. Coia, F. M. d'Heurle, C. Detavernier, C. Cabral, Jr., P. Desjardins, and A. J. Kellock, Defect Diffus. Forum, 237-240, 825 (2005). 0015-8321
- (2005) Defect Diffus. Forum , vol.237-240 , pp. 825
- Lavoie, C.¹ Coia, C.² D'Heurle, F.M.³ Detavernier, C.⁴ Cabral Jr., C.⁵ Desjardins, P.⁶ Kellock, A.J.⁷

5
- 0346258044
- 0028-0836 10.1038/nature02198.
- C. Detavernier, A. S. Özcan, J. Jordan-Sweet, E. A. Stach, J. Tersoff, F. M. Ross, and C. Lavoie, Nature (London) 0028-0836 10.1038/nature02198, 426, 641 (2003).
- (2003) Nature (London) , vol.426 , pp. 641
- Detavernier, C.¹ Özcan, A.S.² Jordan-Sweet, J.³ Stach, E.A.⁴ Tersoff, J.⁵ Ross, F.M.⁶ Lavoie, C.⁷

6
- 33947601586
- 0003-6951 10.1063/1.2716362.
- K. De Keyser, C. Detavernier, and R. L. Van Meirhaeghe, Appl. Phys. Lett. 0003-6951 10.1063/1.2716362, 90, 121920 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 121920
- De Keyser, K.¹ Detavernier, C.² Van Meirhaeghe, R.L.³

7
- 0032620901
- 0003-6951 10.1063/1.124803.
- D. Mangelinck, J. Y. Dai, J. S. Pan, and S. K. Lahiri, Appl. Phys. Lett. 0003-6951 10.1063/1.124803, 75, 1736 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1736
- Mangelinck, D.¹ Dai, J.Y.² Pan, J.S.³ Lahiri, S.K.⁴

8
- 31144444157
- 1071-1023 10.1116/1.1990166.
- J. F. Wen, L. B. Wang, C. H. Liu, H. H. Lee, J. Hwang, C. P. Ouyang, T. W. Pi, J. W. Hwang, and C. P. Cheng, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1990166, 23, 1659 (2005).
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 1659
- Wen, J.F.¹ Wang, L.B.² Liu, C.H.³ Lee, H.H.⁴ Hwang, J.⁵ Ouyang, C.P.⁶ Pi, T.W.⁷ Hwang, J.W.⁸ Cheng, C.P.⁹

9
- 0000624768
- 0365-110X.
- K. Toman, Acta Crystallogr. 0365-110X, 5, 329 (1952).
- (1952) Acta Crystallogr. , vol.5 , pp. 329
- Toman, K.¹

10
- 0344462149
- A. Osawa and M. Okamoto, Sci. Rep. Tohoku Imp. Univ., Ser. 1, 27, 326 (1939).
- (1939) Sci. Rep. Tohoku Imp. Univ., Ser. 1 , vol.27 , pp. 326
- Osawa, A.¹ Okamoto, M.²

11
- 11944260961
- 0031-9007 10.1103/PhysRevLett.74.1163.
- H. von Känel, C. Schwarz, S. Goncalvesconto, E. Muller, L. Miglio, F. Tavazza, and G. Malegori, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.74. 1163, 74, 1163 (1995).
- (1995) Phys. Rev. Lett. , vol.74 , pp. 1163
- Von Känel, H.¹ Schwarz, C.² Goncalvesconto, S.³ Muller, E.⁴ Miglio, L.⁵ Tavazza, F.⁶ Malegori, G.⁷

12
- 33745994121
- 0163-1829 10.1103/PhysRevB.45.13807.
- H. von Känel, K. A. Mader, E. Muller, N. Onda, and H. Sirringhaus, Phys. Rev. B 0163-1829 10.1103/PhysRevB.45.13807, 45, 13807 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 13807
- Von Känel, H.¹ Mader, K.A.² Muller, E.³ Onda, N.⁴ Sirringhaus, H.⁵

13
- 0000517493
- 0039-6028 10.1016/0039-6028(89)90006-X.
- J. M. Gibson and J. L. Batstone, Surf. Sci. 0039-6028 10.1016/0039-6028(89)90006-X, 208, 317 (1989).
- (1989) Surf. Sci. , vol.208 , pp. 317
- Gibson, J.M.¹ Batstone, J.L.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.