Extreme-low-power thermal convective accelerometer based on cnt sensing element

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 1040-1042

  Zhang, Yu ^a   Li, Wen J ^a   Tabata, Osamu ^b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LOW POWER; MICROMACHINED; OPERATION PRINCIPLES; PROOF MASS; SENSING ELEMENTS; SOLID HEATING; TEMPERATURE DIFFERENCES; TEMPERATURE PROFILES; THERMAL DETECTORS; THERMAL PROFILES;

CARBON NANOTUBES; SENSORS;

ACCELEROMETERS;

EID: 70349671774     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068751     Document Type: Conference Paper

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