HDL modeling of convective accelerometers for system design and optimization

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 178-184

  Leman, O ^a   Mailly, F ^a   Latorre, L ^a   Nouet, P ^a  

^a LIRMM   (France)

Author keywords

Accelerometer; CMOS; HDL modeling; MEMS

Indexed keywords

CMOS INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MICROELECTRONICS; OPTIMIZATION; SYSTEMS ANALYSIS;

HDL MODELING; MONOLITHIC SYSTEM;

ACCELEROMETERS;

EID: 38849197503     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.07.034     Document Type: Article

References (10)

1. Leung A.M., Jones J., Czyzewska E., Chen J., and Woods B. Micromachined accelerometer based on convection heat transfer. Proceedings of the IEEE MEMS'98. Heidelberg, Germany, January 25-29 (1998) 627-630
2. Milanovic V., Bowen E., Zaghloul M.E., Tea N.H., Suehle J.S., Payne B., and Gaitan M. Micromachined convective accelerometers in standard integrated circuits technology. Appl. Phys. Lett. 76 4 (2000) 508-510
3. Mailly F., Giani A., Martinez A., Bonnot R., Temple-Boyer P., and Boyer A. Micromachined thermal accelerometer. Sens. Actuators A 103 3 (2003) 359-363
4. Luo X.B., Yang Y.J., Zheng F., Li Z.X., and Guo Z.Y. An optimized micromachined convective accelerometer with no proof mass. J. Michromech. Microeng. 11 (2001) 504-508
5. Chaehoi A., Latorre L., Mailly F., and Nouet P. Experimental and finite-element study of convective accelerometer on CMOS. Proceedings of the EUROSENSORS'05. Barcelona, Spain, September 11-14 (2005)
6. Chaehoi A., Mailly F., Latorre L., and Nouet P. Experimental and finite-element study of convective accelerometer on CMOS. Sens. Actuators A 132/1 (2006) 78-84
7. Leman O., Chaehoi A., Mailly F., Latorre L., and Nouet P. Modeling of a CMOS convective accelerometer for HDL integration. Proceedings of the ESSDERC 2006. Montreux, Switzerland, September 18-22 (2006)
8. Nyquist H. Thermal agitation of electric charge in conductors. Phys. Rev. 32 (1928) 110-113
9. Fischer J.H. Noise sources and calculation techniques for switched capacitor filters. IEEE J. Solid-state Circuits SC-17 4 (1982) 742-752
10. Billoti A., and Monreal G. Chopper-stabilized amplifiers with a track-and-hold signal demodulator. IEEE Trans. Circuits Syst. I Fundam. Theory Appl. 46 4 (1999) 490-495