A liquid-filled buoyancy-driven convective micromachined accelerometer

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1061-1069

  Lin, Lin ^a   Jones, John ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Accelerometer; Buoyancy; Natural convection

Indexed keywords

ACCELEROMETERS; APPROXIMATION THEORY; BUOYANCY; COMPUTATIONAL FLUID DYNAMICS; CURVE FITTING; FLOW OF FLUIDS; MATHEMATICAL MODELS; MICROMACHINING; NATURAL CONVECTION; PRANDTL NUMBER; THERMAL EFFECTS;

BUOYANCY-DRIVEN CONVECTIVE ACCELEROMETER; MICROMACHINED ACCELEROMETER; WORKING FLUID;

MICROELECTROMECHANICAL DEVICES;

EID: 27644520832     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.856651     Document Type: Article

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