A CMOS compatible thermal accelerometer without solid proof mass, based on porous silicon thermal isolation

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 848-851

  Goustouridis, D ^a   Kaltsas, G ^b   Nassiopoulou, A G ^a  

^a INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

^b UNIVERSITY OF WEST ATTICA   (Greece)

Author keywords

Accelerometer; Porous silicon; Thermal sensor

Indexed keywords

ACCELEROMETERS; HEAT CONVECTION; POLYSILICON; POROUS SILICON; SIGNAL PROCESSING; THERMOPILES;

HOT AIR; THERMAL ACCELEROMETERS; THERMAL ISOLATION; THERMAL SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 27944461866     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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