Optical and electrical properties of co-sputtered amorphous transparent conducting zinc indium tin oxide thin films

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6002-6007

  Saji, K J ^a   Jayaraj, M K ^a  

^a Department of Physics   (India)

Author keywords

Amorphous oxides; Co sputtering; Transparent conducting oxides; Zinc indium tin oxide

Indexed keywords

AMORPHOUS FILMS; ATMOSPHERIC TEMPERATURE; CARRIER CONCENTRATION; CONDUCTIVE FILMS; ELECTRIC CONDUCTIVITY; HALL MOBILITY; SEMICONDUCTING ZINC COMPOUNDS; SPUTTERING; TRANSPARENCY;

AMORPHOUS OXIDES; CO SPUTTERING; TRANSPARENT CONDUCTING OXIDES; ZINC INDIUM TIN OXIDES;

THIN FILMS;

EID: 44449170021     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.097     Document Type: Article

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