The mobility of negative ions in CF3I, CF3I - N2, CF3I - Ar, CF3I - Xe, C2 F6, and CHF3, and of Positive Ions in C2 F4 and c-C4F8

IEEE Transactions on Plasma Science

Volumn 37, Issue 9 SPEC. ISS. PART 1, 2009, Pages 1665-1669

  de Urquijo, Jaime ^a   Juárez, Antonio M ^a  

^a INSTITUTO DE CIENCIAS FÍSICAS   (Mexico)

Author keywords

Blanc's law; Electronegative gases; Gaseous dielectrics; Halocarbon gases; Mobility and drift velocity; Plasma etching; Positive and negative ions

Indexed keywords

BLANC'S LAW; ELECTRONEGATIVE GASES; GASEOUS DIELECTRICS; HALOCARBON GASES; MOBILITY AND DRIFT VELOCITY; POSITIVE AND NEGATIVE IONS;

DIELECTRIC DEVICES; ELECTRIC FIELDS; IONIZATION OF GASES; PARTIAL DISCHARGES; PLASMA ETCHING; PLASMAS; POSITIVE IONS; TABLE LOOKUP; XENON;

NEGATIVE IONS;

EID: 70349468015     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2022362     Document Type: Article

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