A time-resolved study of ionization, electron attachment and positive-ion drift in methane

Journal of Physics D: Applied Physics

Volumn 32, Issue 1, 1999, Pages 41-45

  De Urquijo, J ^a   Arriaga, C A ^a   Cisneros, C ^a   Alvarez, I ^a  

^a INSTITUTO DE CIENCIAS FÍSICAS   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; IONIZATION OF GASES; METHANE; POSITIVE IONS;

ELECTRON ATTACHMENT; IONIC AVALANCHES;

PLASMA APPLICATIONS;

EID: 0033531049     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/1/008     Document Type: Article

References (14)

1. Bouef J P and Merad A 1997 Plasma Processing of Semiconductors ed P F Williams (Dordrecht: Kluwer) p 291
2. Tabata A, Kuno Y, Suzuoki Y and Mizutani T 1997 J. Phys. D: Appl. Phys. 30 194
3. Bordage M C 1995 Doctorat d'Etat Thèses Université Paul Sabatier de Toulouse
4. Hunter S R, Carter J G and Christophorou L G 1986 J. Appl. Phys. 60 24
5. Davies D K, Kline L E and Bies W E 1989 J. Appl. Phys. 65 3311
6. Trepka L V and Neurt H. 1963 Z. Naturf. a 18 1295
7. Sharp T E and Dowell J T 1967 J. Chem. Phys. 46 1530
8. Raether H 1964 Electron Avalanches and Breakdown in Gases (London: Butterworths)
9. Yoshida K, Ohshima T, Ohuchi H and Tagashira H 1996 J. Phys. D: Appl. Phys. 29 1209
10. de Urquijo J, Domínguez I, Cisneros C and Alvarez I 1997 J. Phys. B: At. Mol. Opt. Phys. 30 4395
11. Anicich V G 1993 J. Phys. Chem. Ref. Data 22 1469
12. Wannier G H, 1953 Bell Syst. Tech. J. 32 170
13. Mason E A and McDaniel E W 1988 Transport Properties of Ions in Gases (New York: Wiley)
14. Huq M S, Doverspike L D, and Champion R L 1983 Phys. Rev. A 27 785