SCOPUS 정보 검색 플랫폼

Volumn 4, Issue SUPPL.1, 2007, Pages

Spectroscopic diagnostics of DBD remote plasma in Ar/fluorocarbon mixtures - Correlation between plasma parameters and thin film properties

(3) Vinogradov, Igor a Shakhatre, Mahmud a Lunk, Achim a

a UNIVERSITY OF STUTTGART (Germany)

Author keywords

DBD remote plasma; Deposition rate; Dielectric barrier discharge (DBD); Fluorocarbon plasma; FT IR; FT IR absorption spectroscopy; Plasma polymerization; XPS

Indexed keywords

DBD REMOTE PLASMA; DIELECTRIC BARRIER DISCHARGE (DBD); FLUOROCARBON PLASMA; FT-IR; FT-IR ABSORPTION SPECTROSCOPY; XPS;

ABSORPTION; ATOMIC SPECTROSCOPY; DEPOSITION RATES; DIELECTRIC DEVICES; ELECTRIC DISCHARGES; FLOW CONTROL; INFRARED ABSORPTION; INFRARED SPECTROSCOPY; PLASMA DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; POLYMER FILMS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ABSORPTION SPECTROSCOPY;

EID: 70349419697 PISSN: 16128850 EISSN: 16128869 Source Type: Journal
DOI: 10.1002/ppap.200731908 Document Type: Conference Paper

Times cited : (7)

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