Spectroscopic diagnostics of DBD in Ar/fluorocarbon mixtures - Correlation between plasma parameters and properties of deposited polymer films

Plasma Processes and Polymers

Volumn 2, Issue 3, 2005, Pages 201-208

  Vinogradov, Igor ^a   Lunk, Achim ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Dielectric barrier discharges (DBD); FT IR; Hydrophobic coatings; Pulsed discharges; UV vis spectroscopy

Indexed keywords

ABSORPTION SPECTROSCOPY; ARGON; ATMOSPHERIC PRESSURE; CHEMICAL ANALYSIS; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MIXTURES; MOLECULAR STRUCTURE; PLASMAS; PLASTIC FILMS; POLYMERS; SURFACE TENSION;

DIELECTRIC BARRIER DISCHARGES (DBD); HYDROPHOBIC COATINGS; PULSED DISCHARGES; UV-VIS SPECTROSCOPY;

FLUOROCARBONS;

EID: 23044449159     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200400086     Document Type: Article

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