Free C2F4 jet deposition of thin PTFE-like films

Plasma Processes and Polymers

Volumn 2, Issue 6, 2005, Pages 464-471

  Rebrov, Aleksei K ^a   Sharafudinov, Rustam S ^a   Shishkin, Andrey V ^a   Timoshenko, Nikolai I ^a  

^a KUTATELADZE INSTITUTE OF THERMOPHYSICS   (Russian Federation)

Author keywords

Films; Jet; Polymerization; Polytetrafluoroethylene (PTFE); Vacuum

Indexed keywords

DECOMPOSITION; DEPOSITION; FLOW CONTROL; FLUOROCARBONS; JETS; MONOMERS; POLYMERIZATION; POLYTETRAFLUOROETHYLENES; PROCESS CONTROL; SUPERSONIC FLOW; THIN FILMS; VACUUM APPLICATIONS;

FREE JET DEPOSITION; GAS-JET DEPOSITION; SUPERSONIC JET;

PLASTIC FILMS;

EID: 23144456712     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200400081     Document Type: Article

References (30)

1. I. I. Bondar, N. P. Dubinin, L. M. Gert, D. S. Gornyi, Poverkhn. Fiz. Khim. Mekh. 1983, 7, 44.
2. V. P. Kazachenko, A. V. Rogachev, High Energy Chem. 1999, 34, 270.
3. A. Pique, R. A. McGill, D. B. Chrisey, D. Leonhardt, T. E. Mslna, B. J. Spargo, J. H. Callahan, R. W. Vachet, R. Chung, M. A. Bucaro, Thin Solid Films. 1999, 356, 536.
4. C. Biloiu, I. A. Biloiu, Y. Sakai, Y. Suda, A. Ohta, J. Vac. Sci. Technol. A 2004, 22, 13.
5. J. H. Correll, Plast. Technol. 1964, 10, 45.
6. K. K. S. Lau, S. K. Murthy, H. G. P. Lewis, J. Fluorine Chem. 2003, 122, 93.
7. G. Cicala, A. Milella, F. Palumbo, P. Rossini, P. Favia, R. d'Agostino, Macromolecules 2002, 35, 8920.
8. A. Milella, F. Palumbo, P. Favia, G. Cicala, R. d'Agostino, Plasma Process. Polym. 2004, 1, 164.
9. A. K. Rebrov, J. Vac. Sci. Technol. A 2001, 19, 1679.
10. A. K. Rebrov, "Vacuum Technologies and Equipment", in: Proc. 4th Int. Symp. "Vacuum Technologies and Equipmen" (ISVTE - 4), April 23-27, 2001, Kharkov, Ukraine 2001, p. 6.
11. A. K. Rebrov, "On Gas Dynamic Structure of High Pressure Low Density Jets", in: Problems of Thermophysics and Physical Hydrodynamics, Nauka, Novosibirsk 1974, p. 262.
12. H. Z. Ashkenas, F. S. Sherman, Rarefied Gas Dyn. 1964, 84.
13. AIP Conf. Proc., Vol. 585, T. J. Bartel, M. A. Gallis, Eds., AIP, Melville 2001.
14. S. L. Madorsky, "Thermal Degradation of Organic Polymers", Interscience Publishers, J. Wiley, 1964.
15. E. E. Lewis, M. A. Naylor, J. Am. Chem. Soc. 1947, 69, 1968.
16. L. M. Sverdlov, M. A. Kovner, E. P. Kraynov, "Oscillatory Spectra of Polyatomic Molecules", Nauka, Gl. red. phis.-mat. lit., Moscow 1970.
17. "Comprehensive Chemical Kinetics. Vol. 3. The Formation and Decay of Excited Species", C. H. Bamford, C. F. H. Tipper, Eds., Elsevier, Amsterdam 1969.
18. B. B. Mandelbrot, "The Fractal Geometry of Nature", W. H. Freeman and Company, San Francisco 1982.
19. H. Usui, H. Koshikawa, K. Tanaka, J. Vac. Sci. Technol. A 1995, 13, 2318.
20. "Sprouse Collection of Infrared Spectra. Book I: Polymers", Sprouse Scientific Systems, Paoli, Inc., Pennsylvania 1987, p. 96.
21. N. P. G. Roeges, "A Guide to the Complete Interpretation of Infrared Spectra of Organic Structures", Wiley, New York 1994.
22. "Infrared Characteristic Group Frequencies. Tables and Charts", 2nd edition, G. Socrates, Ed., J. Wiley & Sons, Chichester 1994.
23. K. Takahashi, K. Tachibana, J. Vac. Sci. Technol. A 2002, 20, 305.
24. N. Takada, K. Shibagaki, K. Sasaki, K. Kadota, K. I. Oyama, J. Vac. Sci. Technol. A 2001, 19, 689.
25. J. J. Senkevich, D. W. Sherer, J. Vac. Sci. Technol. A 2000, 18, 377.
26. S. Agraharam, D. W. Hess, P. A. Kohl, S. A. B. Allen, J. Vac. Sci. Technol. A 1999, 17, 3265.
27. S. Limb, K. Gleason, D. J. Edell, E. F. Gleason, J. Vac. Sci. Technol. A 1997, 15, 1814.
28. M. Inayoshi, M. Hori, T. Goto, M. Hiramatsu, M. Nawata, S. Hattori, J. Vac. Sci. Technol. A 1996, 14, 1981.
29. G. B. Blanchet, Appl. Phys. Lett. 1993, 62, 479.
30. R. d'Agostino, F. Cramarossa, F. Fracassi, F. Illuzzi, in: "Plasma Deposition, Treatment and Etching of Polymers", R. d'Agostino, Ed., Academic, San Diego 1990, p. 95.