Mechanical modelling of capacitive RF MEMS shunt switches

DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Volumn , Issue , 2009, Pages 19-22

  Marcelli, Romolo ^a   Lucibello, Andrea ^a   De Angelis, Giorgio ^a   Proietti, Emanuela ^a   Comastri, Daniele ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

3D SIMULATIONS; ACTUATION MECHANISM; ANALYTICAL APPROACH; ANALYTICAL EVALUATION; ANALYTICAL MODEL; COPLANAR WAVEGUIDE CONFIGURATIONS; DEFORMED SHAPE; FEM SIMULATIONS; MATHCAD PROGRAM; MECHANICAL MODELLING; MECHANICAL RESPONSE; RF-MEMS; SHUNT SWITCH; SUSPENDED BEAMS;

COPLANAR WAVEGUIDES; MEMS; MICROELECTROMECHANICAL DEVICES; SWITCHES; THREE DIMENSIONAL COMPUTER GRAPHICS; TWO DIMENSIONAL;

THREE DIMENSIONAL;

EID: 70349208926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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