Fabrication and performance of blazed transmission gratings for x-ray astronomy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7011, Issue , 2008, Pages

  Heilmann, Ralf K ^a   Ahn, Minseung ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Blazed transmission grating; Constellation X; Critical angle transmission grating; Extreme ultraviolet; Soft x ray; X ray optics; X ray spectroscopy

Indexed keywords

BLAZED TRANSMISSION GRATING; CONSTELLATION-X; CRITICAL-ANGLE TRANSMISSION GRATING; EXTREME ULTRAVIOLET; SOFT X-RAY;

ASTRONOMICAL SATELLITES; DIFFRACTION EFFICIENCY; ELECTROMAGNETIC WAVES; FABRICATION; LIGHT; OPTICAL INSTRUMENTS; OPTICAL TELESCOPES; SPACE TELESCOPES; SPACECRAFT OBSERVATORIES; ULTRAVIOLET DEVICES; X RAY CAMERAS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY SPECTROMETERS; X RAY SPECTROSCOPY; X RAYS;

GAMMA RAYS;

EID: 70249130202     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.789176     Document Type: Conference Paper

References (25)

1. F. B. S. Paerels and S. M. Kahn, "High-resolution x-ray spectroscopy with Chandra and XMM-Newton," Ann. Rev. Astron. Astrophys. 41, 291-342 (2003).
2. F. D. Seward et al., "Calibration and efficiency of the Einstein objective grating spectrometer," Appl. Opt. 21, 2012-2021 (1982).
3. F. B. S. Paerels, A. C. Brinkman, A. J. F. Denboggende, P. A. J. Dekorte, and J. Dijkstra, "The EXOSAT low-energy imaging telescopes and transmission grating spectrometers - calibration and in-flight verification," Astron. Astrophys. Suppl. Ser. 85, 1021-1048 (1990).
4. C. R. Canizares et al., "The Chandra high-energy transmission grating: Design, fabrication, ground calibration, and 5 years in flight," PASP 117, 1144-1171 (2005).
5. J. W. den Herder et al., "The reflection grating spectrometer on board XMM-Newton," Astron. Astrophys. 365, L7-L17 (2001).
6. A. E. Franke et al., "Super-smooth x-ray reflection grating fabrication," J. Vac. Sci. Technol. B 15, 2940-2945 (1997).
7. A. Rasmussen et al., "Grating arrays for high-throughput soft x-ray spectrometers," Proc. SPIE 5168, 248-259 (2004).
8. L. I. Goray, "Rigorous efficiency calculations for blazed gratings working in in- and off-plane mountings in the 5-50-å wavelengths range," Proc. SPIE 5168, 260-270 (2004).
9. R. K. Heilmann et al., "Advances in reflection grating technology for Constellation-X," Proc. SPIE 5168, 271-282 (2004).
10. R. L. McEntaffer et al., "X-ray performance of gratings in the extreme off-plane mount," Proc. SPIE 5168, 492-498 (2004).
11. C.-H. Chang et al., "High fidelity blazed grating replication using nanoimprint lithography," J. Vac. Sci. Technol. B 22, 3260 (2004).
12. J. F. Seely et al., "Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region," Appl. Opt. 45, 1680-1687 (2006).
13. W. C. Cash Jr., "X-ray optics 2: A technique for high-resolution spectroscopy," Appl. Opt. 30, 1749-1759 (1991).
14. W. C. Cash and A. F. Shipley, "Off-plane grating mount tolerances for Constellation-X," Proc. SPIE 5488, 335-340 (2004).
15. R. K. Heilmann, M. Ahn, E. M. Gullikson, and M. L. Schattenburg, "Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors," Opt. Express 16, 8658-8669 (2008).
16. D. T. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, 1999).
17. M. Born and E. Wolf, Principles of Optics (Cambridge University Press, 1998).
18. M. G. Moharam, D. A. Pommet, E. B. Grann, T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings - enhanced transmittance matrix approach," J. Opt. Soc. Am. A 12, 1077-1086 (1995).
19. K. Flanagan et al., "Spectrometer concept and design for x-ray astronomy using a blazed transmission grating," Proc. SPIE 6688, 66880Y (2007).
20. M. Ahn, R. K. Heilmann, and M. L. Schattenburg, "Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers," J. Vac. Sci. Technol. B 25, 2593-2597 (2007).
21. R. K. Heilmann, C. G. Chen, P. T. Konkola, M. L. Schattenburg, "Dimensional metrology for nanometerscale science and engineering: Towards sub-nanometer accurate encoders," Nanotechnology 15, S504-S511 (2004).
22. M. Ahn, R. K. Heilmann, and M. L. Schattenburg, "Fabrication of 200 nm-period blazed transmission gratings on silicon-on-insulator wafers," submitted to J. Vac. Sci. Technol. B.
23. J. W. Elam, D. Routkevitch, P. P. Mardilovich, and S. M. George, "Conformal coating on ultrahigh-aspectratio nanopores of anodic alumina by atomic layer deposition," Chem. Mat. 15, 3507-3517 (2003).
24. C. Lillie, W. Cash, N. Arav, J. M. Shull, and J. Linsky, "High-resolution soft x-ray spectroscopy for Constellation-X," Proc. SPIE 6686, 668612 (2007).
25. C.-H. Chang, Y. Zhao, R. K. Heilmann, and M. L. Schattenburg, "Fabrication of 50 nm-period gratings with multilevel interference lithography," Optics Letters, doc ID 95394 (posted 11 June 2008, in press).