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Volumn 29, Issue 9, 2009, Pages 2585-2589
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XPS characterization of TiN layer on bearing steel surface treated by plasma immersion ion implantation and deposition technique
a
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Author keywords
Bearing steel; PIIID; Titanium nitride (TiN) film; XPS analysis
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Indexed keywords
ANALYSIS RESULTS;
ATOMIC FORCE MICROSCOPES;
BEARING STEEL;
BEARING STEELS;
BOND ENERGIES;
CHEMICAL STATE;
CRYSTAL FACE;
HIGH UNIFORMITY;
ION ETCHING;
N-COMPOUNDS;
NITROGEN ATOM;
PIIID;
PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION;
PREFERRED ORIENTATIONS;
PROTECTIVE FILMS;
SMOOTH SURFACE;
SPACE FILLING;
SURFACE LAYERS;
SURFACE MODIFIED LAYER;
TEST METHOD;
TIN FILMS;
TIN LAYERS;
TIO;
TITANIUM COMPONENTS;
TITANIUM NITRIDE FILMS;
XPS;
XPS ANALYSIS;
XPS CHARACTERIZATION;
BEARINGS (STRUCTURAL);
CHEMICAL BONDS;
COMPLEXATION;
CRYSTAL ORIENTATION;
ION BOMBARDMENT;
ION IMPLANTATION;
METAL ANALYSIS;
PLASMA DEPOSITION;
PLASMAS;
STEEL;
TITANIUM;
TITANIUM OXIDES;
TRANSITION METAL COMPOUNDS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
TITANIUM NITRIDE;
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EID: 70249123901
PISSN: 10000593
EISSN: None
Source Type: Journal
DOI: 10.3964/j.issn.1000-0593(2009)09-2585-05 Document Type: Article |
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Times cited : (4)
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References (19)
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