Growth of TiN by plasma glow discharge sputtering, diffusion and ion surface alloying

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 25, Issue 4, 2005, Pages 271-274

  Liu, Yanping ^a   Xu, Jinyong ^a,b   Kui, Xiaoyun ^a   Wang, Jianzhong ^a   Gao, Yuan ^a   Xu, Zhong ^a  

^a TAIYUAN UNIVERSITY OF TECHNOLOGY   (China)

^b Guilin University of Electronic   (China)

Author keywords

Deposition; Diffusion coating; Glow discharge; Hollow cathode effect; TiN; Tip discharge

Indexed keywords

DIFFUSION COATINGS; GLOW DISCHARGES; MECHANICAL PROPERTIES; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; STEEL; SUBSTRATES; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

HOLLOW-CATHODE EFFECT; INTERFACIAL DIFFUSION; ION SURFACE ALLOYING; PLASMA GLOW DISCHARGE SPUTTERING; TIP DISCHARGE;

PROTECTIVE COATINGS;

EID: 25144462105     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Lang Fengqun, Yu Zhiming. The corrosion resistance and wear resistance of thick TiN coatings deposited by arc ion plating[J] Surface and Coatings Technology, 2001, 145: 80-87
2. Xu Zhong. Method and apparatus for introducing normally slide materials into substrate surface[P]. US Patent, 4520268, 1985-05-24
3. Xu Zhong. Surface alloying simplified[J]. Advanced Materials and Process, 1997, 152: 33-35
4. Xu Zhong, Gu Fengying. New development in surface alloying[A]. Proc of International Congress on 5th Heat Treatment of Materials[C]. Budapest, Hungary, 1986: 20-24
5. Xu Zhong, Liu xiaoping, Li Zhonghou. New development in double glow surface alloying technology.[J] Chinese Journal of Mechanical Engineering, 2002, 15: 186-188