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Materials Science and Engineering: A

Volumn 445-446, Issue , 2007, Pages 558-562

Surface properties and microstructure of implanted TiN films using MEVVA ion source

(4) Yang, J H a,b Cheng, M F a Luo, X D a Zhang, T H b

a NANTONG UNIVERSITY (China)

b BEIJING NORMAL UNIVERSITY (China)

Author keywords

Ion implantation; TEM; TiN; TRIDYN; Wear resistance; XPS

Indexed keywords

GRAIN SIZE AND SHAPE; ION IMPLANTATION; ION SOURCES; LIGHT INTERFERENCE; MICROSTRUCTURE; SURFACE PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

EXTRACTION VOLTAGE; METAL VAPOR VACUUM ARC; PIN-ON-DISC APPARATUS;

TITANIUM NITRIDE;

GRAIN SIZE AND SHAPE; ION IMPLANTATION; ION SOURCES; LIGHT INTERFERENCE; MICROSTRUCTURE; SURFACE PROPERTIES; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33845900461 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2006.09.073 Document Type: Article

Times cited : (27)

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