Temperature dependence of nucleation and growth of nanoparticles in low pressure Ar/CH4 RF discharges

Journal of Physics D: Applied Physics

Volumn 42, Issue 15, 2009, Pages

  Beckers, J ^a   Stoffels, W W ^a   Kroesen, G M W ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COAGULATION TIME; CRITICAL DENSITY; ELECTRON DENSITIES; GAS TEMPERATURE; LASER LIGHT SCATTERING; LOW PRESSURES; MICROWAVE CAVITY; MODEL ESTIMATES; NANOMETRES; NEUTRAL PARTICLES; NUCLEATION AND GROWTH; NUCLEATION PROCESS; PARTICLE GROWTH RATES; PHASE ANGLES; RF DISCHARGE; RF VOLTAGE; ROOM TEMPERATURE; SIMPLIFIED MODELS; TEMPERATURE DEPENDENCE; TIME-SCALES;

HYDROCARBONS; LIGHT SCATTERING; NANOPARTICLES; NUCLEATION; TEMPERATURE DISTRIBUTION;

COAGULATION;

EID: 70249088736     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/15/155206     Document Type: Article

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