Ion molecule and dust particle formation in Ar/CH4, Ar/C 2H2 and Ar/C3H6 radio-frequency plasmas

Contributions to Plasma Physics

Volumn 45, Issue 5-6, 2005, Pages 378-384

  Do, H T ^a   Thieme, G ^b   Frohlich M ^a,c   Kersten, H ^b   Hippler, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b INP GREIFSWALD   (Germany)

^c Institut für Werkstoff Forschung   (Germany)

Author keywords

Dusty plasmas; Ion energy distribution; Ion mass spectra

Indexed keywords

DUST; ELECTRIC DISCHARGES; IONS; MASS SPECTROMETRY; MOLECULES; RADIO WAVES;

CH 4; DUST PARTICLE; DUSTY PLASMAS; ION ENERGY DISTRIBUTIONS; ION MASS; ION MASS SPECTRUM; MASS SPECTRA; MOLECULES FORMATION; PARTICLE FORMATIONS; RADIO FREQUENCY PLASMA;

PROCESS MONITORING;

EID: 24944485151     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200510043     Document Type: Article

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