Robust Superelastic, metallic amplification unit for piezoelectric microactuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7362, Issue , 2009, Pages

  Bolzmacher, C ^a   Bauer, K ^a   Schmid, U ^b   Hafez, M ^c   Seidel, H ^c  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^c SAARLAND UNIVERSITY   (Germany)

Author keywords

Amplification unit; Piezoelectric microactuator; Superelastic NiTi alloy

Indexed keywords

AMPLIFICATION FACTORS; ASSEMBLY PROCESS; EXPERIMENTAL MEASUREMENTS; FABRICATION PROCESS; HIGH FREQUENCY; INCREASED STROKE; INTEGRATION PROCESS; MEMBRANE STRUCTURES; NICKEL TITANIUM; NICKEL TITANIUM ALLOY; PIEZOELECTRIC MICRO-ACTUATORS; PIEZOELECTRIC MICROACTUATOR; QUALITY FACTORS; SPECIFIC LOADS; STATIC AND DYNAMIC; SUPERELASTIC; SUPERELASTIC NITI ALLOY;

ALLOYS; COMPUTER SIMULATION; DYNAMIC RESPONSE; FLEXIBLE STRUCTURES; LASER ABLATION; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SMART SENSORS; TITANIUM; TITANIUM ALLOYS;

AMPLIFICATION;

EID: 69949155081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.821727     Document Type: Conference Paper

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