Micro-structured electrode arrays: High-frequency discharges at atmospheric pressure - Characterization and new applications

Vacuum

Volumn 73, Issue 3-4, 2004, Pages 327-332

  Baars Hibbe, Lutz ^a   Schrader, Christian ^a   Sichler, Philipp ^a   Cordes, Thorben ^a   Gericke, Karl Heinz ^a   Büttgenbach, Stephanus ^a   Draeger, Siegfried ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Atmospheric pressure plasma; Micro structured electrodes; Paschen law; Radio frequency discharges; Sterilization

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; GLOW DISCHARGES; MICROMACHINING; MICROSTRUCTURE; PLASMA SOURCES; SILICA; THIN FILMS;

ATMOSPHERIC PRESSURE PLASMA; MICRO-STRUCTURED ELECTRODES; PASCHEN LAW; RADIO FREQUENCY DISCHARGES; STERILIZATION;

ELECTRODES;

EID: 1842582506     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.107     Document Type: Conference Paper

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